Hybrid isolation process with deep diffusion and V-groove for reverse blocking IGBTs

Haruo Nakazawa, Masaaki Ogino, Hiroki Wakimoto, Tsunehiro Nakajima, Yoshikazu Takahashi, David Hongfei Lu

Research output: Chapter in Book/Report/Conference proceedingConference contribution

16 Citations (Scopus)

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Engineering & Materials Science