HRTEM investigation of the 90° domain structure and ferroelectric properties of multi-layered PZT thin films

Takanori Kiguchi, Naoki Wakiya, Kazuo Shinozaki, Nobuyasu Mizutani

Research output: Contribution to journalConference articlepeer-review

14 Citations (Scopus)

Abstract

Multi-layered epitaxial Pb(Zrx,Ti1-x)O3 (PZT) films with x = 0.2-0.5 were deposited on La0.5Sr0.5CoO3-x (LSCO)/(001)STO and LSCO/CeO2/YSZ/(001)Si substrates with buffer layers. We investigated using HRTEM and XRD how the 90° domain structure and the P-E hysteresis character depend on the difference in the thermal expansion coefficient by changing the Zr/Ti composition and the substrate. XTEM analysis showed that large 90° domains 8-30 nm in width penetrate the columnar grain and the PZT layer in the PZT stacked film Zr/Ti = 20/80,30/70,40/60. On the other hand, close-packed small 90° domains 4-5 nm in width were present in epitaxial columnar grains in the PZT50/50 stacked film. The P-E hysteresis loops of PZT20/80 stacked films deposited on STO and Si substrates show a remanent polarization of 2Pr = 136 and 80 μC/cm2, respectively. On the other hand, those of PZT50/50 stacked films deposited on STO and Si substrates show a polarization of 2Pr = 125 and 36 μC/cm2, respectively. Thus, the P-E hysteresis loop of PZT50/50 exhibits remarkable differences in 2Pr values between the substrates.

Original languageEnglish
Pages (from-to)708-712
Number of pages5
JournalMicroelectronic Engineering
Volume66
Issue number1-4
DOIs
Publication statusPublished - 2003 Apr 1
Externally publishedYes
EventIUMRS-ICEM 2002 - Xi an, China
Duration: 2002 Jun 102002 Jun 14

Keywords

  • 90° domain
  • Ferroelectric properties
  • HRTEM
  • PZT
  • Si
  • SrTiO
  • Thin film

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Electrical and Electronic Engineering

Fingerprint Dive into the research topics of 'HRTEM investigation of the 90° domain structure and ferroelectric properties of multi-layered PZT thin films'. Together they form a unique fingerprint.

Cite this