HRTEM investigation of effect of various rare earth oxide dopants on epitaxial zirconia high-K gate dielectrics

Takanori Kiguchi, Naoki Wakiya, Kazuo Shinozaki, Nobuyasu Mizutani

Research output: Contribution to journalConference articlepeer-review

6 Citations (Scopus)

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Engineering & Materials Science

Physics & Astronomy

Chemical Compounds