Hot embossing of a sine-grid for a surface encoder

Ryutaro Hirabayashi, Young Jin Noh, Yoshikazu Arai, Wei Gao

Research output: Contribution to journalArticlepeer-review

Abstract

This paper describes the replication of a precision sinusoidal grid surface, which is used as the measurement reference of a surface encoder for nanometrology of multi-axis positions. The profile of the gird surface is a superposition of sinusoidal waves in the x-direction and the y-direction with spatial wavelengths on the order of 100 μm and amplitudes on the order of 100 nm. The area of the surface is on the order of several tens of millimeters to hundreds of millimeters. The aluminum master surfaces were fabricated on a diamond turning machine equipped with a fast tool servo, which has advantages of high accuracy and good surface finish but time-consuming for fabricating micro-structures over a large area. Replication from the master surface was then carried out for fast fabrication. Hot embossing was chosen as the replication method. Experiments of replication on polymer films were conducted.

Original languageEnglish
Pages (from-to)102-106
Number of pages5
JournalNami Jishu yu Jingmi Gongcheng/Nanotechnology and Precision Engineering
Volume5
Issue number2
Publication statusPublished - 2007 Jun 1

Keywords

  • Metrology surface
  • Nanometrology
  • Polymer materials
  • Replication

ASJC Scopus subject areas

  • Instrumentation
  • Mechanical Engineering
  • Industrial and Manufacturing Engineering

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