Hollow optical fibers for ultraviolet and vacuum ultraviolet light

Yuji Matsuura, Mitsunobu Miyagi

Research output: Contribution to journalArticle

15 Citations (Scopus)

Abstract

Hollow optical fibers composed of glass capillary tubing with an inner coating of aluminum thin film are fabricated for delivery of ultraviolet and vacuum ultraviolet light. The aluminum film is formed by a chemical vapor deposition method employing a metalorganic aluminum as a precursor. Transmission properties of the aluminum-coated hollow fibers are evaluated with ArF- and F2-excimer lasers. Spectroscopy measurement in the vacuum ultraviolet region is also performed.

Original languageEnglish
Pages (from-to)1430-1434
Number of pages5
JournalIEEE Journal on Selected Topics in Quantum Electronics
Volume10
Issue number6
DOIs
Publication statusPublished - 2004 Nov 1

Keywords

  • Excimer lasers
  • Hollow optical fibers
  • Optical fiber fabrication
  • Ultraviolet spectroscopy

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics
  • Electrical and Electronic Engineering

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