Hollow glass waveguides with three-layer dielectric coating fabricated by chemical vapor deposition

Yuji Matsuura, James A. Harrington

Research output: Contribution to journalArticle

37 Citations (Scopus)

Abstract

Hollow glass waveguides with three dielectric layers are fabricated with a chemical vapor deposition technique. The waveguides have an inner three-layer stack of aluminum oxide and titanium oxide, with the thickness optimized for the 3-μm wavelength of a Er:YAG laser. The measured attenuation spectra of the waveguides in the mid-infrared region show interference peaks that are due to the multiple dielectric layers and also exhibit a low-loss region at the design wavelength of 3 mm. The theoretical evaluation of the waveguide loss, including the inner surface roughness of the guide, shows that the roughness strongly affects the transmission losses of the multilayer-coated waveguides.

Original languageEnglish
Pages (from-to)1255-1259
Number of pages5
JournalJournal of the Optical Society of America A: Optics and Image Science, and Vision
Volume14
Issue number6
DOIs
Publication statusPublished - 1997 Jun
Externally publishedYes

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Computer Vision and Pattern Recognition

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