Abstract
For delivery of ArF and KrF excimer laser light, a hollow fiber composed of a glass capillary tube and an aluminum thin film on the inside was proposed. A thin aluminum film is deposited by metal-organic chemical vapor deposition employing dimethylethylamine alane as the source material. Measured loss spectra in vacuum-UV and UV regions and measured losses for ArF-excimer laser light show the low loss property of the aluminum-coated fiber at both of the ArF and KrF excimer laser light. The straight loss of 1-m long, 1-mm bore fiber was 1.0 dB for ArF and 0.4 dB for KrF excimer lasers.
| Original language | English |
|---|---|
| Pages (from-to) | 2-7 |
| Number of pages | 6 |
| Journal | Proceedings of SPIE - The International Society for Optical Engineering |
| Volume | 3596 |
| DOIs | |
| Publication status | Published - 1999 |
| Event | Proceedings of the 1999 Specialty Fiber Optics for Medical Applications - San Jose, CA, USA Duration: 1999 Jan 24 → 1999 Jan 25 |
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
- Computer Science Applications
- Applied Mathematics
- Electrical and Electronic Engineering