High‐Temperature Active Oxidation of Chemically Vapor‐Deposited Silicon Carbide in CO─CO2 Atmosphere

Takayuki Narushima, Takashi Goto, Yoshio Yokoyama, Yasutaka Iguchi, Toshio Hirai

Research output: Contribution to journalArticle

39 Citations (Scopus)

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Chemical Compounds

Engineering & Materials Science