Highly sensitive trace moisture ball surface acoustic wave sensor using SiOx film

Satoshi Hagihara, Toshihiro Tsuji, Toru Oizumi, Nobuo Takeda, Shingo Akao, Tsuneo Ohgi, Kosuke Takayanagi, Takayuki Yanagisawa, Noritaka Nakaso, Yusuke Tsukahara, Kazushi Yamanaka

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15 Citations (Scopus)

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Physics & Astronomy

Engineering & Materials Science