Highly Sensitive Thin-Film Magnetic Field Sensor Meandering Coplanar Line

H. Uetake; T. Kawakami; K. Moriya; S. Yabukami; T. Ozawa

doi:10.1109/TMAG.2015.2448552

Highly Sensitive Thin-Film Magnetic Field Sensor Meandering Coplanar Line

H. Uetake, T. Kawakami, K. Moriya, S. Yabukami, T. Ozawa

Research output: Contribution to journal › Article › peer-review

3 Citations (Scopus)

Abstract

A very sensitive thin-film sensor was developed using a meandering coplanar line fabricated from Sr₃₃Ti₁₆O₅₁ film (3 μm thick), amorphous Co₈₅Nb₁₂Zr₃ film (1 mm×2.45 mm, 0.3-2 μm thick), and Cu/Cr film (2/0.1 μm). The deposited SrTiO film enhanced the sensitivity of a magnetic field sensor, a phase change of more than 30°/Oe and a gain of over -40 dB being achieved simultaneously. The maximum phase change (sensitivity) was observed for a CoNbZr film thickness of ∼0.5-1 μm. The sensitive bias field and carrier frequency increased as the CoNbZr film thickness increased. The optimum CoNbZr film thickness was realized by the tradeoff between the sensitive bias field and the volume of the CoNbZr film.

Original language	English
Article number	7130635
Journal	IEEE Transactions on Magnetics
Volume	51
Issue number	11
DOIs	https://doi.org/10.1109/TMAG.2015.2448552
Publication status	Published - 2015 Nov 1
Externally published	Yes

Keywords

Meandering coplanar line
SrTiO film
thin-film sensor

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Electrical and Electronic Engineering

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10.1109/TMAG.2015.2448552

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title = "Highly Sensitive Thin-Film Magnetic Field Sensor Meandering Coplanar Line",

abstract = "A very sensitive thin-film sensor was developed using a meandering coplanar line fabricated from Sr33Ti16O51 film (3 μm thick), amorphous Co85Nb12Zr3 film (1 mm×2.45 mm, 0.3-2 μm thick), and Cu/Cr film (2/0.1 μm). The deposited SrTiO film enhanced the sensitivity of a magnetic field sensor, a phase change of more than 30°/Oe and a gain of over -40 dB being achieved simultaneously. The maximum phase change (sensitivity) was observed for a CoNbZr film thickness of ∼0.5-1 μm. The sensitive bias field and carrier frequency increased as the CoNbZr film thickness increased. The optimum CoNbZr film thickness was realized by the tradeoff between the sensitive bias field and the volume of the CoNbZr film.",

keywords = "Meandering coplanar line, SrTiO film, thin-film sensor",

author = "H. Uetake and T. Kawakami and K. Moriya and S. Yabukami and T. Ozawa",

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AU - Uetake, H.

AU - Kawakami, T.

AU - Moriya, K.

AU - Yabukami, S.

AU - Ozawa, T.

PY - 2015/11/1

Y1 - 2015/11/1

N2 - A very sensitive thin-film sensor was developed using a meandering coplanar line fabricated from Sr33Ti16O51 film (3 μm thick), amorphous Co85Nb12Zr3 film (1 mm×2.45 mm, 0.3-2 μm thick), and Cu/Cr film (2/0.1 μm). The deposited SrTiO film enhanced the sensitivity of a magnetic field sensor, a phase change of more than 30°/Oe and a gain of over -40 dB being achieved simultaneously. The maximum phase change (sensitivity) was observed for a CoNbZr film thickness of ∼0.5-1 μm. The sensitive bias field and carrier frequency increased as the CoNbZr film thickness increased. The optimum CoNbZr film thickness was realized by the tradeoff between the sensitive bias field and the volume of the CoNbZr film.

AB - A very sensitive thin-film sensor was developed using a meandering coplanar line fabricated from Sr33Ti16O51 film (3 μm thick), amorphous Co85Nb12Zr3 film (1 mm×2.45 mm, 0.3-2 μm thick), and Cu/Cr film (2/0.1 μm). The deposited SrTiO film enhanced the sensitivity of a magnetic field sensor, a phase change of more than 30°/Oe and a gain of over -40 dB being achieved simultaneously. The maximum phase change (sensitivity) was observed for a CoNbZr film thickness of ∼0.5-1 μm. The sensitive bias field and carrier frequency increased as the CoNbZr film thickness increased. The optimum CoNbZr film thickness was realized by the tradeoff between the sensitive bias field and the volume of the CoNbZr film.

KW - Meandering coplanar line

KW - SrTiO film

KW - thin-film sensor

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Highly Sensitive Thin-Film Magnetic Field Sensor Meandering Coplanar Line

Abstract

Keywords

ASJC Scopus subject areas

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