Highly Sensitive Structure of Nanomechanical Gas Sensor Based on Stress Concentration Generated by Cantilever Lateral Deflection

Zhuqing Wang, Takumi Hokama, Masaya Toda, Mai Yamazaki, Krzysztof Moorthi, Takahito Ono

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

This paper reports a nanomechanical gas sensor using stress concentration at a piezoresistor. The sensor consist of a functional polymer embedded into Si comb and a Si cantilever with the piezoresistor at the support. The composite membrane generates a stress depending on absorption of gas species. The stress is converted via the lateral deflection of the cantilever to the enhanced strain of the piezoresistor at the support part of the cantilever. The difference in the stiffness of the cantilever and the piezoresistive part induces a stress concentration. The proposed design gives approximately 20 times higher sensitivity than other conventional sensors, and ΔR/R of the final design for 1%RH humidity change is estimated to be ΔR/R = 2.34×10-3. The sensitivity to humidity of the fabricated sensor is 3.92×10-5 /%RH and this sensor can distinguish acetone and ethanol.

Original languageEnglish
Title of host publication2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages2107-2109
Number of pages3
ISBN (Electronic)9781728120072
DOIs
Publication statusPublished - 2019 Jun
Event20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII - Berlin, Germany
Duration: 2019 Jun 232019 Jun 27

Publication series

Name2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII

Conference

Conference20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII
CountryGermany
CityBerlin
Period19/6/2319/6/27

Keywords

  • Cantilever
  • Gas sensor
  • Lateral deflection
  • Piezoresistor
  • Polymer

ASJC Scopus subject areas

  • Process Chemistry and Technology
  • Spectroscopy
  • Electrical and Electronic Engineering
  • Mechanical Engineering
  • Electronic, Optical and Magnetic Materials
  • Control and Optimization
  • Instrumentation

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