TY - GEN
T1 - Highly sensitive strain sensors using surface acoustic wave on aluminum nitride thin film for wireless sensor networks
AU - Bao, Z.
AU - Hara, M.
AU - Kuwano, H.
PY - 2015/8/5
Y1 - 2015/8/5
N2 - We newly developed surface acoustic wave (SAW)-based strain sensors using aluminum nitride (AlN) films to integrate with oscillator circuits. An interdigital transducer (IDT) was fabricated on a layered structure consisting of AlN, Pt/Ti, and SiO2 deposited on a Si substrate. A SAW was excited in the piezoelectric AlN film and resonated at 107.8 MHz. The Q-factor and effective electromechanical coupling coefficient keff2 were 700 and 0.46% at the resonance, respectively. When we applied stress to the sensor, the resonant frequency was linearly changed with a sensitivity of 107.2 MHz/strain below the applied strain of the order of 10-5. The sensor can be fully fabricated at low temperature (<400 °C) and can be embedded in a one-chip oscillator by post-IC-process.
AB - We newly developed surface acoustic wave (SAW)-based strain sensors using aluminum nitride (AlN) films to integrate with oscillator circuits. An interdigital transducer (IDT) was fabricated on a layered structure consisting of AlN, Pt/Ti, and SiO2 deposited on a Si substrate. A SAW was excited in the piezoelectric AlN film and resonated at 107.8 MHz. The Q-factor and effective electromechanical coupling coefficient keff2 were 700 and 0.46% at the resonance, respectively. When we applied stress to the sensor, the resonant frequency was linearly changed with a sensitivity of 107.2 MHz/strain below the applied strain of the order of 10-5. The sensor can be fully fabricated at low temperature (<400 °C) and can be embedded in a one-chip oscillator by post-IC-process.
KW - AlN
KW - SAW
KW - Strain
KW - sensor network
UR - http://www.scopus.com/inward/record.url?scp=84955505538&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=84955505538&partnerID=8YFLogxK
U2 - 10.1109/TRANSDUCERS.2015.7181154
DO - 10.1109/TRANSDUCERS.2015.7181154
M3 - Conference contribution
AN - SCOPUS:84955505538
T3 - 2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015
SP - 1239
EP - 1242
BT - 2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015
Y2 - 21 June 2015 through 25 June 2015
ER -