TY - GEN
T1 - Highly-sensitive graphene nano-ribbon-base strain sensor
AU - Sasaki, Shinichirou
AU - Meng, Yang
AU - Suzuki, Ken
AU - Miura, Hideo
PY - 2016/1/1
Y1 - 2016/1/1
N2 - Large-area and high-quality monolayer graphene was synthesized in order to fabricate a graphene-base highly sensitive strain sensor. A rapid LPCVD (Low Pressure Chemical vaper deposition) synthesis process of monolayer graphene was developed by using acetylene as a resource gas. To synthesize high-quality single-crystal graphene, the surface of copper substrate was strongly orientated to (111) crystallographic plane. By optimizing the concentration of acetylene gas by diluting hydrogen, the high quality of monolayer single-crystalline graphene film was successfully grown on the copper substrate. A strain sensor was fabricated using the graphene-coated Cu foils by applying the MEMS process and reactive ion etching (RIE). Then, the sensor was transferred onto a polydimethysiloxane (PDMS) substrate. Tree-dimensional bending test was performed to investigate the piezoresistive property of the patterned graphene nano-ribbon. It was confirmed that the highly sensitive strain sensor was obtained when the width of the nanoribbon was thinner than 70 nm.
AB - Large-area and high-quality monolayer graphene was synthesized in order to fabricate a graphene-base highly sensitive strain sensor. A rapid LPCVD (Low Pressure Chemical vaper deposition) synthesis process of monolayer graphene was developed by using acetylene as a resource gas. To synthesize high-quality single-crystal graphene, the surface of copper substrate was strongly orientated to (111) crystallographic plane. By optimizing the concentration of acetylene gas by diluting hydrogen, the high quality of monolayer single-crystalline graphene film was successfully grown on the copper substrate. A strain sensor was fabricated using the graphene-coated Cu foils by applying the MEMS process and reactive ion etching (RIE). Then, the sensor was transferred onto a polydimethysiloxane (PDMS) substrate. Tree-dimensional bending test was performed to investigate the piezoresistive property of the patterned graphene nano-ribbon. It was confirmed that the highly sensitive strain sensor was obtained when the width of the nanoribbon was thinner than 70 nm.
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U2 - 10.1115/IMECE201667602
DO - 10.1115/IMECE201667602
M3 - Conference contribution
AN - SCOPUS:85021646437
T3 - ASME International Mechanical Engineering Congress and Exposition, Proceedings (IMECE)
BT - Micro- and Nano-Systems Engineering and Packaging
PB - American Society of Mechanical Engineers (ASME)
T2 - ASME 2016 International Mechanical Engineering Congress and Exposition, IMECE 2016
Y2 - 11 November 2016 through 17 November 2016
ER -