Highly-sensitive graphene nano-ribbon-base strain sensor

Shinichirou Sasaki, Yang Meng, Ken Suzuki, Hideo Miura

Research output: Chapter in Book/Report/Conference proceedingConference contribution

5 Citations (Scopus)

Abstract

Large-area and high-quality monolayer graphene was synthesized in order to fabricate a graphene-base highly sensitive strain sensor. A rapid LPCVD (Low Pressure Chemical vaper deposition) synthesis process of monolayer graphene was developed by using acetylene as a resource gas. To synthesize high-quality single-crystal graphene, the surface of copper substrate was strongly orientated to (111) crystallographic plane. By optimizing the concentration of acetylene gas by diluting hydrogen, the high quality of monolayer single-crystalline graphene film was successfully grown on the copper substrate. A strain sensor was fabricated using the graphene-coated Cu foils by applying the MEMS process and reactive ion etching (RIE). Then, the sensor was transferred onto a polydimethysiloxane (PDMS) substrate. Tree-dimensional bending test was performed to investigate the piezoresistive property of the patterned graphene nano-ribbon. It was confirmed that the highly sensitive strain sensor was obtained when the width of the nanoribbon was thinner than 70 nm.

Original languageEnglish
Title of host publicationMicro- and Nano-Systems Engineering and Packaging
PublisherAmerican Society of Mechanical Engineers (ASME)
ISBN (Electronic)9780791850640
DOIs
Publication statusPublished - 2016 Jan 1
EventASME 2016 International Mechanical Engineering Congress and Exposition, IMECE 2016 - Phoenix, United States
Duration: 2016 Nov 112016 Nov 17

Publication series

NameASME International Mechanical Engineering Congress and Exposition, Proceedings (IMECE)
Volume10

Other

OtherASME 2016 International Mechanical Engineering Congress and Exposition, IMECE 2016
CountryUnited States
CityPhoenix
Period16/11/1116/11/17

ASJC Scopus subject areas

  • Mechanical Engineering

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  • Cite this

    Sasaki, S., Meng, Y., Suzuki, K., & Miura, H. (2016). Highly-sensitive graphene nano-ribbon-base strain sensor. In Micro- and Nano-Systems Engineering and Packaging (ASME International Mechanical Engineering Congress and Exposition, Proceedings (IMECE); Vol. 10). American Society of Mechanical Engineers (ASME). https://doi.org/10.1115/IMECE201667602