A very sensitive thin-film sensor was developed using a coplanar line fabricated from SrTiO (Sr33Ti16O51) film (0.5, 1, 2, 3, and 6 μm thick), amorphous CoNbZr film (5 μm thick), and Cu/Cr film (4 μm/0.2 μm). The deposited SrTiO film had high permittivity of around 31. This film enhanced the sensitivity of the magnetic field sensor, a phase change of more than 100°/Oe and gain of over -40 dB being achieved simultaneously. The sensor with SrTiO film enhanced the sensitivity about 1.6 times greater than that with SiO2 film because of the high permittivity of the SrTiO film. The sensitivity of the sensor increased with increasing thickness of the SrTiO film, a thickness of around 3 μm being sufficient for enhancement of the sensitivity.
- Coplanar line
- SrTi film
- thin-film sensor
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Electrical and Electronic Engineering