TY - JOUR
T1 - Highly sensitive ball surface acoustic wave hydrogen sensor with porous pd-alloy film
AU - Tsuji, Toshihiro
AU - Mihara, Ryosuke
AU - Saito, Tomohiro
AU - Hagihara, Satoshi
AU - Oizumi, Toru
AU - Takeda, Nobuo
AU - Ohgi, Tsuneo
AU - Yanagisawa, Takayuki
AU - Akao, Shingo
AU - Nakaso, Noritaka
AU - Yamanaka, Kazushi
PY - 2014
Y1 - 2014
N2 - In order to commonly use explosive H2 gas as an energy source, fast, sensitive, and low-power consumption sensor is required. We developed a ball surface acoustic wave (SAW) sensor with porous PdPt alloy film to realize such a sensor. The sensor with 20% Pt alloying film was useful for the suppression of a phase transition of Pd and the detection of ppm order concentration at 35°C. The amplitude response was proportional to the square root of the concentration, which was demonstrated for the first time in the field of SAW sensor, resulting in the detection limit of 3.7 ppm at signal to noise ratio of 3. The response time decreased to 1/5, compared with those of pioneering H2 sensors working at room temperature. From these results, it was shown that the fastest and most sensitive hydrogen sensor working at room temperature could be realized using the ball SAW sensor with porous Pd alloy film.
AB - In order to commonly use explosive H2 gas as an energy source, fast, sensitive, and low-power consumption sensor is required. We developed a ball surface acoustic wave (SAW) sensor with porous PdPt alloy film to realize such a sensor. The sensor with 20% Pt alloying film was useful for the suppression of a phase transition of Pd and the detection of ppm order concentration at 35°C. The amplitude response was proportional to the square root of the concentration, which was demonstrated for the first time in the field of SAW sensor, resulting in the detection limit of 3.7 ppm at signal to noise ratio of 3. The response time decreased to 1/5, compared with those of pioneering H2 sensors working at room temperature. From these results, it was shown that the fastest and most sensitive hydrogen sensor working at room temperature could be realized using the ball SAW sensor with porous Pd alloy film.
KW - Hydrogen Sensor
KW - Palladium Platinum Alloy
KW - Porous Film
KW - Response Time
KW - Surface Acoustic Wave
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U2 - 10.2320/matertrans.I-M2014816
DO - 10.2320/matertrans.I-M2014816
M3 - Article
AN - SCOPUS:84903303568
VL - 55
SP - 1040
EP - 1044
JO - Materials Transactions
JF - Materials Transactions
SN - 1345-9678
IS - 7
ER -