Highly sensitive ball surface acoustic wave hydrogen sensor with porous pd-alloy film

Toshihiro Tsuji, Ryosuke Mihara, Tomohiro Saito, Satoshi Hagihara, Toru Oizumi, Nobuo Takeda, Tsuneo Ohgi, Takayuki Yanagisawa, Shingo Akao, Noritaka Nakaso, Kazushi Yamanaka

Research output: Contribution to journalArticlepeer-review

11 Citations (Scopus)

Abstract

In order to commonly use explosive H2 gas as an energy source, fast, sensitive, and low-power consumption sensor is required. We developed a ball surface acoustic wave (SAW) sensor with porous PdPt alloy film to realize such a sensor. The sensor with 20% Pt alloying film was useful for the suppression of a phase transition of Pd and the detection of ppm order concentration at 35°C. The amplitude response was proportional to the square root of the concentration, which was demonstrated for the first time in the field of SAW sensor, resulting in the detection limit of 3.7 ppm at signal to noise ratio of 3. The response time decreased to 1/5, compared with those of pioneering H2 sensors working at room temperature. From these results, it was shown that the fastest and most sensitive hydrogen sensor working at room temperature could be realized using the ball SAW sensor with porous Pd alloy film.

Original languageEnglish
Pages (from-to)1040-1044
Number of pages5
JournalMaterials Transactions
Volume55
Issue number7
DOIs
Publication statusPublished - 2014

Keywords

  • Hydrogen Sensor
  • Palladium Platinum Alloy
  • Porous Film
  • Response Time
  • Surface Acoustic Wave

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

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