TY - GEN
T1 - Highly sensitive 2D strain sensor using carbon nanotube
AU - Kawakami, Hiroshi
AU - Ohnishi, Masato
AU - Suzuki, Ken
AU - Miura, Hideo
PY - 2013/12/1
Y1 - 2013/12/1
N2 - A new highly sensitive strain measurement method has been developed by applying the strain-induced change of the electronic conductivity of CNTs. It is reported that most multiwalled carbon nanotubes (MWCNTs) show metallic conductivity and they are rather cheap comparing with singlewalled carbon nanotubes (SWCNTs). However, it was found that the electric conductivity of MWCNTs changes drastically under uniaxial strain because of the drastic change of their band gap. Therefore, the authors have developed a highly sensitive strain sensor which can detect the local strain distribution by using MWCNTs. In order to design a new sensor using MWCNT, it is very important to control the shape of the MWCNTs under strain. Thus, a method for controlling the shape of the MWCNTs was developed by applying a chemical vapor deposition (CVD) technique. It was found that the shape of the grown MWCNT could be controlled by changing the average thickness of the catalyst and the deposition temperature of the MWCNT. The electrical resistance of the grown MWCNT changed almost linearly with the applied strain, and the maximum strain sensitivity obtained under the application of uniaxial strain was about 10%/1000-μ strain (gauge factor: 100). A two-dimensional strain sensor, which consists of area-arrayed fine bundles of MWCNTs, has been developed by applying MEMS technology. Under the application of compressive strain, the electric resistance was confirmed to increase almost linearly with the applied strain.
AB - A new highly sensitive strain measurement method has been developed by applying the strain-induced change of the electronic conductivity of CNTs. It is reported that most multiwalled carbon nanotubes (MWCNTs) show metallic conductivity and they are rather cheap comparing with singlewalled carbon nanotubes (SWCNTs). However, it was found that the electric conductivity of MWCNTs changes drastically under uniaxial strain because of the drastic change of their band gap. Therefore, the authors have developed a highly sensitive strain sensor which can detect the local strain distribution by using MWCNTs. In order to design a new sensor using MWCNT, it is very important to control the shape of the MWCNTs under strain. Thus, a method for controlling the shape of the MWCNTs was developed by applying a chemical vapor deposition (CVD) technique. It was found that the shape of the grown MWCNT could be controlled by changing the average thickness of the catalyst and the deposition temperature of the MWCNT. The electrical resistance of the grown MWCNT changed almost linearly with the applied strain, and the maximum strain sensitivity obtained under the application of uniaxial strain was about 10%/1000-μ strain (gauge factor: 100). A two-dimensional strain sensor, which consists of area-arrayed fine bundles of MWCNTs, has been developed by applying MEMS technology. Under the application of compressive strain, the electric resistance was confirmed to increase almost linearly with the applied strain.
UR - http://www.scopus.com/inward/record.url?scp=84894643338&partnerID=8YFLogxK
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U2 - 10.1115/IPACK2013-73156
DO - 10.1115/IPACK2013-73156
M3 - Conference contribution
AN - SCOPUS:84894643338
SN - 9780791855751
T3 - ASME 2013 International Technical Conference and Exhibition on Packaging and Integration of Electronic and Photonic Microsystems, InterPACK 2013
BT - ASME 2013 International Technical Conference and Exhibition on Packaging and Integration of Electronic and Photonic Microsystems, InterPACK 2013
T2 - ASME 2013 International Technical Conference and Exhibition on Packaging and Integration of Electronic and Photonic Microsystems, InterPACK 2013
Y2 - 16 July 2013 through 18 July 2013
ER -