Highly reliable fitting for gas delivery systems

Nobukazu Ikeda, Yasuyuki Shirai, Tadahiro Ohmi, Michio Yamaji

Research output: Contribution to journalArticlepeer-review

1 Citation (Scopus)

Abstract

After confirming the basic characteristics of two types of metal gasket fittings, which are used in construction of ultrapure gas delivery systems for semiconductor manufacturing, it is noticed that the pipe usually twists at the time the fitting is tightened. This may be the possible cause of an external leak, therefore a twist leak test was undertaken to confirm the reliability of the seal during assembly. As a result, it was found that one type of fitting leaked and another type of fitting did not leak. This later type did not leak (leak rate is less than 2.98X10-16 Pa m3/s) even after 70° of twisting.

Original languageEnglish
Pages (from-to)181-187
Number of pages7
JournalJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Volume16
Issue number1
DOIs
Publication statusPublished - 1998 Jan 1

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films

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