Highly piezoelectric MgZr co-doped aluminum nitride-based vibrational energy harvesters [Correspondence]

Le Van Minh, Motoaki Hara, Tsuyoshi Yokoyama, Tokihiro Nishihara, Masanori Ueda, Hiroki Kuwano

Research output: Contribution to journalArticle

16 Citations (Scopus)

Abstract

The first MgZr co-doped AlN-based vibrational energy harvester (VEH) is presented. (MgZr)AlN, which is a new class of doped AlN, provides high piezoelectricity and cost advantage. Using 13%-(MgZr)-doped AlN for micromachined VEHs, maximum output power of 1.3 μW was achieved with a Q-factor of 400 when resonant frequency, vibration acceleration, load resistance were 792 Hz, 8 m/s2, and 1.1 MΩ, respectively. Normalized power density was 8.1 kW.g-2.m-3. This was one of the highest values among the currently available piezoelectric VEHs.

Original languageEnglish
Article number7321707
Pages (from-to)2005-2008
Number of pages4
JournalIEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control
Volume62
Issue number11
DOIs
Publication statusPublished - 2015 Nov

ASJC Scopus subject areas

  • Instrumentation
  • Acoustics and Ultrasonics
  • Electrical and Electronic Engineering

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