Highly manufacturable 0.18 um generation LOGIC technology

Shuji Ikeda, Y. Yoshida, K. Shoji, K. Kuroda, K. Komori, N. Suzuki, K. Okuyama, S. Kamohara, N. Ishitsuka, H. Miura, E. Murakami, T. Yamanaka

Research output: Contribution to journalConference articlepeer-review

5 Citations (Scopus)

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