Highly integrated cantilever with light emitting diode, channel waveguide, aperture, and photodiode for scanning near-field optical microscope

M. Sasaki, K. Tanaka, Kazuhiro Hane

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

In this study, a highly integrated cantilever for a scanning near-field optical microscope (SNOM) is described. All components necessary for the SNOM system (light emitting diode (LED) for light source, channel waveguide, nanometer size aperture tip, and photodiode) are integrated on the cantilever.

Original languageEnglish
Title of host publicationDigest of Papers - 2000 International Microprocesses and Nanotechnology Conference, MNC 2000
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages146-147
Number of pages2
ISBN (Electronic)4891140046, 9784891140045
DOIs
Publication statusPublished - 2000 Jan 1
EventInternational Microprocesses and Nanotechnology Conference, MNC 2000 - Tokyo, Japan
Duration: 2000 Jul 112000 Jul 13

Publication series

NameDigest of Papers - 2000 International Microprocesses and Nanotechnology Conference, MNC 2000

Other

OtherInternational Microprocesses and Nanotechnology Conference, MNC 2000
CountryJapan
CityTokyo
Period00/7/1100/7/13

ASJC Scopus subject areas

  • Biotechnology
  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials

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    Sasaki, M., Tanaka, K., & Hane, K. (2000). Highly integrated cantilever with light emitting diode, channel waveguide, aperture, and photodiode for scanning near-field optical microscope. In Digest of Papers - 2000 International Microprocesses and Nanotechnology Conference, MNC 2000 (pp. 146-147). [872666] (Digest of Papers - 2000 International Microprocesses and Nanotechnology Conference, MNC 2000). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/IMNC.2000.872666