Abstract
This work presents the highly efficient, micromachined energy harvester using lead-free piezoelectric AlN thin films grown directly on Ti foils for the first time. 4-μm AlN films with (002)-preferred orientation were grown on 50-μm Ti foils by an AC reactive magnetron sputter with Ar/N2 gas and Al target. The rocking curve full width at half maximum (FWHM) of the (002)-AlN peak was 2.3°, being comparable with that of polycrystalline AlN thin films grown on Si substrates. Highly (002)-oriented AlN films on Ti foils contributed to the excellent properties - normalized piezoelectric coefficient, e33, eff/e33, crystal-AlN of 99.92 %, relative permittivity, ϵr of 9.36. AlN/Ti-based micro-energy harvesters with the cantilever and the proof mass were fabricated and achieved the high normalized power density (NPD) of 1.45 mW.g-2.cm-3. It is the best ever published performance for the environment-friendly energy harvesters developed from metallic substrates.
Original language | English |
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Title of host publication | 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems, MEMS 2017 |
Publisher | Institute of Electrical and Electronics Engineers Inc. |
Pages | 833-836 |
Number of pages | 4 |
ISBN (Electronic) | 9781509050789 |
DOIs | |
Publication status | Published - 2017 Feb 23 |
Event | 30th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2017 - Las Vegas, United States Duration: 2017 Jan 22 → 2017 Jan 26 |
Other
Other | 30th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2017 |
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Country/Territory | United States |
City | Las Vegas |
Period | 17/1/22 → 17/1/26 |
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
- Mechanical Engineering
- Electrical and Electronic Engineering