Highly (100)-oriented Ce 1 - XFe xO 2 - δ solid solution films prepared by laser chemical vapor deposition

J. R. Vargas-Garcia, R. Tu, T. Goto

Research output: Contribution to journalArticlepeer-review

5 Citations (Scopus)

Abstract

Ce 1 - xFe xO 2 - δ solid solution films were prepared on amorphous silica substrates by laser chemical vapor deposition using metal dipivaloylmethanate precursors and a semiconductor InGaAlAs (808 nm in wavelength) laser. X-ray diffraction revealed the formation of single Ce 1 - xFe xO 2 - δ phase at x ≤ 0.15, while CeO 2 and Fe 2O 3 phases were found for higher Fe content. Highly (100)-oriented Ce 1 - xFe xO 2 - δ (x = 0.02) films were obtained at laser power, P L = 50-200 W and deposition temperature, T dep = 800-1063 K. Lotgering factor (200) was calculated to be above 0.8 for films prepared at P L = 50-150 W. X-ray photoelectron spectroscopy revealed the presence of Fe 3+, Ce 4+ and Ce 3+ on solid solution films. Cross-sectional transmission electron microscope images disclosed a film columnar feather-like structure with a large number of nano-scale interspaces. Deposition rates were 2 or 3 orders of magnitude higher than those reported for conventional metal organic chemical vapor deposition of CeO 2.

Original languageEnglish
Pages (from-to)1851-1855
Number of pages5
JournalThin Solid Films
Volume520
Issue number6
DOIs
Publication statusPublished - 2012 Jan 1

Keywords

  • Ce-Fe oxide
  • CeO
  • Laser chemical vapor deposition
  • Oriented films
  • Solid solutions
  • Transmission electron microscopy
  • X-ray diffraction

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Materials Chemistry

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