Highly (004)-oriented texture of γ-LiAlO2 films by laser chemical vapor deposition

Chen Chi; Hirokazu Katsui; Rong Tu; Takashi Goto

doi:10.4028/www.scientific.net/KEM.616.141

Highly (004)-oriented texture of γ-LiAlO₂ films by laser chemical vapor deposition

Chen Chi, Hirokazu Katsui, Rong Tu, Takashi Goto

Materials Processing and Characterization Division

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

(004)-oriented γ-LiAlO₂ films were prepared on poly-crystalline AlN substrates by laser chemical vapor deposition at deposition temperature (T_dep) of 1100-1250 K, molar ratio of Li/Al (RLi/Al) of 1.0-10 and low total pressure (P_tot) of 100-200 Pa. The (004)-oriented γ-LiAlO₂ films consisted of pyramidal grains with a columnar structure. The deposition rate of (004)-oriented γ-LiAlO₂ films reached to 65-72 μm h^-1.

Original language	English
Title of host publication	Advanced Ceramics and Novel Processing
Publisher	Trans Tech Publications Ltd
Pages	141-144
Number of pages	4
ISBN (Print)	9783038351306
DOIs	https://doi.org/10.4028/www.scientific.net/KEM.616.141
Publication status	Published - 2014
Event	5th International Symposium on Advanced Ceramics, ISAC 2013 and 3rd International Symposium on Advanced Synthesis and Processing Technology for Materials, ASPT 2013 - Wuhan, China Duration: 2013 Dec 9 → 2013 Dec 12

Publication series

Name	Key Engineering Materials
Volume	616
ISSN (Print)	1013-9826
ISSN (Electronic)	1662-9795

Other

Other	5th International Symposium on Advanced Ceramics, ISAC 2013 and 3rd International Symposium on Advanced Synthesis and Processing Technology for Materials, ASPT 2013
Country/Territory	China
City	Wuhan
Period	13/12/9 → 13/12/12

Keywords

Faceted texture
Laser CVD
Microstructure
Orientation

ASJC Scopus subject areas

Materials Science(all)
Mechanics of Materials
Mechanical Engineering

Access to Document

10.4028/www.scientific.net/KEM.616.141

Cite this

Chi, C, Katsui, H, Tu, R & Goto, T 2014, Highly (004)-oriented texture of γ-LiAlO₂ films by laser chemical vapor deposition. in Advanced Ceramics and Novel Processing. Key Engineering Materials, vol. 616, Trans Tech Publications Ltd, pp. 141-144, 5th International Symposium on Advanced Ceramics, ISAC 2013 and 3rd International Symposium on Advanced Synthesis and Processing Technology for Materials, ASPT 2013, Wuhan, China, 13/12/9. https://doi.org/10.4028/www.scientific.net/KEM.616.141

@inproceedings{1ae5a64e2ded45f2a170ad43fb6afdd0,

title = "Highly (004)-oriented texture of γ-LiAlO2 films by laser chemical vapor deposition",

abstract = "(004)-oriented γ-LiAlO2 films were prepared on poly-crystalline AlN substrates by laser chemical vapor deposition at deposition temperature (Tdep) of 1100-1250 K, molar ratio of Li/Al (RLi/Al) of 1.0-10 and low total pressure (Ptot) of 100-200 Pa. The (004)-oriented γ-LiAlO2 films consisted of pyramidal grains with a columnar structure. The deposition rate of (004)-oriented γ-LiAlO2 films reached to 65-72 μm h-1.",

keywords = "Faceted texture, Laser CVD, Microstructure, Orientation",

author = "Chen Chi and Hirokazu Katsui and Rong Tu and Takashi Goto",

note = "Copyright: Copyright 2020 Elsevier B.V., All rights reserved.; 5th International Symposium on Advanced Ceramics, ISAC 2013 and 3rd International Symposium on Advanced Synthesis and Processing Technology for Materials, ASPT 2013 ; Conference date: 09-12-2013 Through 12-12-2013",

year = "2014",

doi = "10.4028/www.scientific.net/KEM.616.141",

language = "English",

isbn = "9783038351306",

series = "Key Engineering Materials",

publisher = "Trans Tech Publications Ltd",

pages = "141--144",

booktitle = "Advanced Ceramics and Novel Processing",

}

TY - GEN

T1 - Highly (004)-oriented texture of γ-LiAlO2 films by laser chemical vapor deposition

AU - Chi, Chen

AU - Katsui, Hirokazu

AU - Tu, Rong

AU - Goto, Takashi

PY - 2014

Y1 - 2014

N2 - (004)-oriented γ-LiAlO2 films were prepared on poly-crystalline AlN substrates by laser chemical vapor deposition at deposition temperature (Tdep) of 1100-1250 K, molar ratio of Li/Al (RLi/Al) of 1.0-10 and low total pressure (Ptot) of 100-200 Pa. The (004)-oriented γ-LiAlO2 films consisted of pyramidal grains with a columnar structure. The deposition rate of (004)-oriented γ-LiAlO2 films reached to 65-72 μm h-1.

AB - (004)-oriented γ-LiAlO2 films were prepared on poly-crystalline AlN substrates by laser chemical vapor deposition at deposition temperature (Tdep) of 1100-1250 K, molar ratio of Li/Al (RLi/Al) of 1.0-10 and low total pressure (Ptot) of 100-200 Pa. The (004)-oriented γ-LiAlO2 films consisted of pyramidal grains with a columnar structure. The deposition rate of (004)-oriented γ-LiAlO2 films reached to 65-72 μm h-1.

KW - Faceted texture

KW - Laser CVD

KW - Microstructure

KW - Orientation

UR - http://www.scopus.com/inward/record.url?scp=84904012382&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84904012382&partnerID=8YFLogxK

U2 - 10.4028/www.scientific.net/KEM.616.141

DO - 10.4028/www.scientific.net/KEM.616.141

M3 - Conference contribution

AN - SCOPUS:84904012382

SN - 9783038351306

T3 - Key Engineering Materials

SP - 141

EP - 144

BT - Advanced Ceramics and Novel Processing

PB - Trans Tech Publications Ltd

T2 - 5th International Symposium on Advanced Ceramics, ISAC 2013 and 3rd International Symposium on Advanced Synthesis and Processing Technology for Materials, ASPT 2013

Y2 - 9 December 2013 through 12 December 2013

ER -