@inproceedings{1ae5a64e2ded45f2a170ad43fb6afdd0,
title = "Highly (004)-oriented texture of γ-LiAlO2 films by laser chemical vapor deposition",
abstract = "(004)-oriented γ-LiAlO2 films were prepared on poly-crystalline AlN substrates by laser chemical vapor deposition at deposition temperature (Tdep) of 1100-1250 K, molar ratio of Li/Al (RLi/Al) of 1.0-10 and low total pressure (Ptot) of 100-200 Pa. The (004)-oriented γ-LiAlO2 films consisted of pyramidal grains with a columnar structure. The deposition rate of (004)-oriented γ-LiAlO2 films reached to 65-72 μm h-1.",
keywords = "Faceted texture, Laser CVD, Microstructure, Orientation",
author = "Chen Chi and Hirokazu Katsui and Rong Tu and Takashi Goto",
note = "Copyright: Copyright 2020 Elsevier B.V., All rights reserved.; 5th International Symposium on Advanced Ceramics, ISAC 2013 and 3rd International Symposium on Advanced Synthesis and Processing Technology for Materials, ASPT 2013 ; Conference date: 09-12-2013 Through 12-12-2013",
year = "2014",
doi = "10.4028/www.scientific.net/KEM.616.141",
language = "English",
isbn = "9783038351306",
series = "Key Engineering Materials",
publisher = "Trans Tech Publications Ltd",
pages = "141--144",
booktitle = "Advanced Ceramics and Novel Processing",
}