Highly (004)-oriented texture of γ-LiAlO2 films by laser chemical vapor deposition

Chen Chi, Hirokazu Katsui, Rong Tu, Takashi Goto

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

(004)-oriented γ-LiAlO2 films were prepared on poly-crystalline AlN substrates by laser chemical vapor deposition at deposition temperature (Tdep) of 1100-1250 K, molar ratio of Li/Al (RLi/Al) of 1.0-10 and low total pressure (Ptot) of 100-200 Pa. The (004)-oriented γ-LiAlO2 films consisted of pyramidal grains with a columnar structure. The deposition rate of (004)-oriented γ-LiAlO2 films reached to 65-72 μm h-1.

Original languageEnglish
Title of host publicationAdvanced Ceramics and Novel Processing
PublisherTrans Tech Publications Ltd
Pages141-144
Number of pages4
ISBN (Print)9783038351306
DOIs
Publication statusPublished - 2014
Event5th International Symposium on Advanced Ceramics, ISAC 2013 and 3rd International Symposium on Advanced Synthesis and Processing Technology for Materials, ASPT 2013 - Wuhan, China
Duration: 2013 Dec 92013 Dec 12

Publication series

NameKey Engineering Materials
Volume616
ISSN (Print)1013-9826
ISSN (Electronic)1662-9795

Other

Other5th International Symposium on Advanced Ceramics, ISAC 2013 and 3rd International Symposium on Advanced Synthesis and Processing Technology for Materials, ASPT 2013
CountryChina
CityWuhan
Period13/12/913/12/12

Keywords

  • Faceted texture
  • Laser CVD
  • Microstructure
  • Orientation

ASJC Scopus subject areas

  • Materials Science(all)
  • Mechanics of Materials
  • Mechanical Engineering

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