The authors introduce a method for high-throughput structural characterization of composition-spread thin-film libraries using high-energy x-ray beams in transmission geometry. Scanning the composition-spread film with the x-ray beam yields texture, and in case of polycrystalline spreads, crystal structure maps. In addition, regions with single-crystalline or epitaxial films can be readily identified and further characterized by tilting the sample and taking additional diffraction patterns at selected angles. The authors describe the application of this techniques to the ternary oxide system Ce O2 - Al2 O3 -Hf O2.
ASJC Scopus subject areas
- Physics and Astronomy (miscellaneous)