High-throughput characterization of local conductivity of Nd 0.9 Ca 0.1 Ba 2 Cu 3 O 7-δ thin film by the low-temperature scanning microwave microscope

Sohei Okazaki, Noriaki Okazaki, Xiaoru Zhao, Hidetaka Sugaya, Sei Ichiro Yaginuma, Ryota Takahashi, Makoto Murakami, Yuji Matsumoto, Toyohiro Chikyow, Hideomi Koinuma, Tetsuya Hasegawa

Research output: Contribution to journalConference articlepeer-review

3 Citations (Scopus)


We developed a scanning microwave microscope (SμM) designed for high-throughput electric-property screening as well as for rapid construction of electronic phase diagrams at low temperatures. As a sensor probe, we used a high-Q λ/4 coaxial cavity resonator to which a thin needle with ball-tip end was attached. The sensor module was mounted on the low-temperature XYZ stage, which allowed us to map out the change of resonance frequency and quality factor due to the local tip-sample interaction at low temperatures. From the measurements of combinatorial thin films, such as Ti 1-x Co x O 2-δ and Nd 0.9 Ca 0.1 Ba 2 Cu 3 O 7-δ (NCBCO), it was demonstrated that this SμM system has enough performance for the high-throughput characterization of sample conductance under variable temperature conditions.

Original languageEnglish
Pages (from-to)2615-2621
Number of pages7
JournalApplied Surface Science
Issue number7
Publication statusPublished - 2006 Jan 21
EventProceedings of the Third Japan-US Workshop on Combinatorial Material Science and Technology CMST-e SI -
Duration: 2004 Dec 72004 Dec 10


  • Combinatorial materials science
  • Conductivity
  • Low-temperature scanning microwave microscope (LT-SμM)
  • Superconductivity
  • Ti Co o

ASJC Scopus subject areas

  • Chemistry(all)
  • Condensed Matter Physics
  • Physics and Astronomy(all)
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films

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