High Tg polyarylate thin films for photonic device applications

Okihiro Sugihara, Masahiro Tomiki, Hisashi Fujimura, Chikara Egami, Naomichi Okamoto, Masaaki Fujiwara, Kenji Yasue

Research output: Contribution to journalConference article

Abstract

Polyarylates (PARs) with high glass transition temperature (Tg) are used for photonic device applications. Optical properties are investigated, and it indicates that the PARs show high thermal stability as well as high optical transparency. Electron-beam lithography can be performed using the PAR thin films, and high resolution surface relief gratings are fabricated by direct electron-beam writing technique together with thermal development.

Original languageEnglish
Pages (from-to)111-114
Number of pages4
JournalMolecular Crystals and Liquid Crystals Science and Technology Section A: Molecular Crystals and Liquid Crystals
Volume349
DOIs
Publication statusPublished - 2000 Jan 1
EventProceedings of the Korea-Japan Joint Forum 1999 Organic Materials for Electronics and Photonics - Kyongju, Korea, Republic of
Duration: 1999 Sep 91999 Sep 11

Keywords

  • Electron-beam lithography
  • Polyarylate
  • Surface relief grating
  • Thermal development
  • Thermal stability

ASJC Scopus subject areas

  • Condensed Matter Physics

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