High-temperature stability of Nb12O29 transparent conductor

Takeo Ohsawa, Tohru Suzuki, Taro Hitosugi

    Research output: Contribution to journalArticlepeer-review

    Abstract

    The transparent conductor Nb12O29 was found to exhibit high-temperature stability superior to that of conventional transparent conducting oxides (TCOs). The Nb12O29 thin film was fabricated on a glass substrate, followed by annealing at 1000 C in vacuum, and a high conductivity of 3.0 × 102 Ω- 1 cm - 1 at room temperature was maintained even after vacuum annealing at 800 C. Although the conductivity of the Nb12O29 film was decreased by annealing at 300 C in air, the initial high conductivity was recovered upon subsequent vacuum annealing. These properties indicate that Nb12O29 is a promising material applicable in cases where conventional TCOs cannot be used.

    Original languageEnglish
    Pages (from-to)218-220
    Number of pages3
    JournalThin Solid Films
    Volume526
    DOIs
    Publication statusPublished - 2012 Dec 30

    Keywords

    • Conductivity
    • High-temperature stability
    • Reactive sputtering
    • Transparent conducting oxide

    ASJC Scopus subject areas

    • Electronic, Optical and Magnetic Materials
    • Surfaces and Interfaces
    • Surfaces, Coatings and Films
    • Metals and Alloys
    • Materials Chemistry

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