High temperature passive oxidation mechanism of CVD SiC

Takashi Goto

Research output: Chapter in Book/Report/Conference proceedingConference contribution

7 Citations (Scopus)

Abstract

The passive oxidation mechanism of CVD SiC was discussed from experimental results with high-temperature thermogravimetry and thermodynamic analyses. The bubble formation temperature around 1900 K could be too low for an oxygen inward diffusion limited process but conform to a CO outward diffusion limited process. The parabolic rate constant (kp) had weak oxygen partial pressure (PO2) dependence, kp ∝ PO2n where n = 0.09 to 0.12. These n values may be consistent with the CO outward diffusion limited process. The activation energy of kp obtained in the present study, 210 kJ/mol, could suggest a different mechanism from the well-approved oxygen molecule permeation limited process at lower temperatures below 1600 K. Amorphous phase was significantly contained in SiO2 scales formed in an N 2-O2 atmosphere. No effect of the amorphous formation on kp was identified.

Original languageEnglish
Title of host publicationHigh-Temperature Oxidation and Corrosion 2005 - Proceedings of the International Symposium on High-Temperature Oxidation and Corrosion 2005
PublisherTrans Tech Publications Ltd
Pages27-36
Number of pages10
ISBN (Print)9780878494095
DOIs
Publication statusPublished - 2006 Jan 1
EventInternational Symposium on High-Temperature Oxidation and Corrosion, ISHOC-05 - Nara, Japan
Duration: 2005 Nov 302005 Dec 2

Publication series

NameMaterials Science Forum
Volume522-523
ISSN (Print)0255-5476
ISSN (Electronic)1662-9752

Other

OtherInternational Symposium on High-Temperature Oxidation and Corrosion, ISHOC-05
CountryJapan
CityNara
Period05/11/3005/12/2

Keywords

  • Bubble formation
  • CO outward diffusion
  • CVD
  • Chemical vapor deposition
  • Linear parabolic
  • Parabolic rate constant
  • Passive oxidation
  • Rate limiting process
  • SiC

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

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