High temperature coefficient of resonant frequency induced by thermal stress using a double-supported mechanical resonator with a simple structure for highly thermal sensing

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

A resonant frequency changes of some shape double-supported mechanical resonators are investigated for highly sensitive thermal measurement using resonant sensors. Thermal stress of resonators, which depends on the shape, has large effects to the temperature coefficient of resonant frequency (TCRF). The resonant frequency changes of Y, I, T, shape double-supported resonators are experimentally evaluated changing the temperature, and compared with the theoretical thermal stress change. The Y shape resonator is most effective shape to increase TCRF due to the large thermal stress, and the value is -650 ppm/K. The experimental resonant frequency change and theoretical thermal stress have a good agreement, which contribute to estimate the TCRF of the double-supported resonators.

Original languageEnglish
Title of host publicationTRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages970-973
Number of pages4
ISBN (Electronic)9781538627310
DOIs
Publication statusPublished - 2017 Jul 26
Event19th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2017 - Kaohsiung, Taiwan, Province of China
Duration: 2017 Jun 182017 Jun 22

Publication series

NameTRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems

Other

Other19th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2017
CountryTaiwan, Province of China
CityKaohsiung
Period17/6/1817/6/22

Keywords

  • Thermal sensor
  • mechanical resonator
  • strcture
  • temperature coefficient of resonant frequency
  • thermal stress

ASJC Scopus subject areas

  • Chemical Health and Safety
  • Instrumentation
  • Electrical and Electronic Engineering

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    Inomata, N., & Ono, T. (2017). High temperature coefficient of resonant frequency induced by thermal stress using a double-supported mechanical resonator with a simple structure for highly thermal sensing. In TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems (pp. 970-973). [7994212] (TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/TRANSDUCERS.2017.7994212