High-Speed preparation of titania films by laser chemical vapor deposition

Takashi Goto, Teiichi Kimura, Rong Tu

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Titanium oxide (TiO2) films were prepared by MOCVD and laser-assisted CVD (LCVD), and investigated the effect of laser irradiation on the deposition rate, morphology and preferred orientation. In MOCVD by using Ti (O-i-C3H7)2(dpm)2, the crystal structure changed from (004) oriented anatase to (200) oriented rutile with increasing substrate temperature (TSUb). A columnar texture was developed over TSUb=873K. The highest deposition rate was 30 μm/h at TSUb=1000 K. The assist of laser tremendously enhanced the deposition rate up to 700 and 1900 μm/h by using Ti (O-i-C3H 7)2(dpm)2 and Ti(O-n-C4H 9)4 precursors, respectively. The plasma formation was accompanied to the enhancement of deposition rates. The morphology ranging from fine grain columnar, feather-like columnar and dense plate-like TiO2 films were observed depending on mainly substrate temperature. Significantly (213) and (200) oriented anatase and (110) oriented rutile films were obtained by LCVD.

Original languageEnglish
Title of host publicationMaterials Science and Technology Conference and Exhibition, MS and T'07 - "Exploring Structure, Processing, and Applications Across Multiple Materials Systems"
Pages2997-3006
Number of pages10
Publication statusPublished - 2007 Dec 1
EventMaterials Science and Technology Conference and Exhibition, MS and T'07 - "Exploring Structure, Processing, and Applications Across Multiple Materials Systems" - Detroit, MI, United States
Duration: 2007 Sep 162007 Sep 20

Publication series

NameMaterials Science and Technology Conference and Exhibition, MS and T'07 - "Exploring Structure, Processing, and Applications Across Multiple Materials Systems"
Volume5

Other

OtherMaterials Science and Technology Conference and Exhibition, MS and T'07 - "Exploring Structure, Processing, and Applications Across Multiple Materials Systems"
CountryUnited States
CityDetroit, MI
Period07/9/1607/9/20

Keywords

  • Anatase
  • Deposition rate
  • Laser chemical vapor deposition
  • Rutile
  • TiO film

ASJC Scopus subject areas

  • Industrial and Manufacturing Engineering
  • Mechanical Engineering
  • Mechanics of Materials
  • Materials Science(all)
  • Condensed Matter Physics

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  • Cite this

    Goto, T., Kimura, T., & Tu, R. (2007). High-Speed preparation of titania films by laser chemical vapor deposition. In Materials Science and Technology Conference and Exhibition, MS and T'07 - "Exploring Structure, Processing, and Applications Across Multiple Materials Systems" (pp. 2997-3006). (Materials Science and Technology Conference and Exhibition, MS and T'07 - "Exploring Structure, Processing, and Applications Across Multiple Materials Systems"; Vol. 5).