High-speed preparation of <111>- and <110>-oriented β-SiC films by laser chemical vapor deposition

Song Zhang, Qingfang Xu, Rong Tu, Takashi Goto, Lianmeng Zhang

Research output: Contribution to journalArticlepeer-review

34 Citations (Scopus)

Abstract

Highly oriented <111> and <110> β-SiC films were prepared on Si(100) single crystal substrates by laser chemical vapor deposition using a diode laser (wavelength = 808 nm) and HMDS (Si(CH3) 3-Si(CH3)3) as a precursor. The effects of laser power (PL), total pressure (Ptot), and deposition temperature (Tdep) on the orientation, microstructure, and deposition rate (Rdep) were investigated. The orientation of the β-SiC films changed from <111> to random to <110> with increasing P L and Ptot. The <111>-, randomly, and <110>-oriented β-SiC films exhibited dense, cauliflower-like, and cone-like microstructures, respectively. Stacking faults were observed in the <111>- and <110>-oriented films, and aligned parallel to the (111) plane in the <111>-oriented film, whereas they were perpendicular to the (110) plane in the <110>-oriented film. The highest Rdep of the <111>-oriented β-SiC film was 200 μm/h at Ptot = 200 Pa and Tdep = 1420 K, whereas that of the <110>-oriented film was 3600 μm/h at Ptot = 600 Pa and Tdep = 1605 K.

Original languageEnglish
Pages (from-to)952-958
Number of pages7
JournalJournal of the American Ceramic Society
Volume97
Issue number3
DOIs
Publication statusPublished - 2014 Mar

ASJC Scopus subject areas

  • Ceramics and Composites
  • Materials Chemistry

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