Abstract
YBa2Cu3O7-δ (YBCO) films were prepared by laser chemical vapor deposition using Y(DPM)3, Ba(DPM)2/Ba(TMOD)2 and Cu(DPM)2 as precursors with enhancement by a continuous wave Nd:YAG laser. A c-axis-oriented YBCO film almost entirely in a single phase was obtained. The YBCO film consisted of rectangular grains about 30 μm in size. The highest deposition rate was about 100 μm h- 1, which was 10-1000 times higher than that of conventional MOCVD.
| Original language | English |
|---|---|
| Pages (from-to) | 102-104 |
| Number of pages | 3 |
| Journal | Materials Letters |
| Volume | 64 |
| Issue number | 1 |
| DOIs | |
| Publication status | Published - 2010 Jan 15 |
Keywords
- High deposition rate
- Laser chemical vapor deposition
- YBCO
ASJC Scopus subject areas
- Materials Science(all)
- Condensed Matter Physics
- Mechanics of Materials
- Mechanical Engineering
Fingerprint Dive into the research topics of 'High-speed preparation of c-axis-oriented YBa<sub>2</sub>Cu<sub>3</sub>O<sub>7-δ</sub> film by laser chemical vapor deposition'. Together they form a unique fingerprint.
Cite this
Zhao, P., Ito, A., Tu, R., & Goto, T. (2010). High-speed preparation of c-axis-oriented YBa2Cu3O7-δ film by laser chemical vapor deposition. Materials Letters, 64(1), 102-104. https://doi.org/10.1016/j.matlet.2009.10.027