High-speed preparation of c-axis-oriented YBa2Cu3O7-δ film by laser chemical vapor deposition

Pei Zhao; Akihiko Ito; Rong Tu; Takashi Goto

doi:10.1016/j.matlet.2009.10.027

High-speed preparation of c-axis-oriented YBa₂Cu₃O_7-δ film by laser chemical vapor deposition

Pei Zhao, Akihiko Ito, Rong Tu, Takashi Goto

Materials Processing and Characterization Division

Research output: Contribution to journal › Article › peer-review

19 Citations (Scopus)

Abstract

YBa₂Cu₃O_7-δ (YBCO) films were prepared by laser chemical vapor deposition using Y(DPM)₃, Ba(DPM)₂/Ba(TMOD)₂ and Cu(DPM)₂ as precursors with enhancement by a continuous wave Nd:YAG laser. A c-axis-oriented YBCO film almost entirely in a single phase was obtained. The YBCO film consisted of rectangular grains about 30 μm in size. The highest deposition rate was about 100 μm h^{- 1}, which was 10-1000 times higher than that of conventional MOCVD.

Original language	English
Pages (from-to)	102-104
Number of pages	3
Journal	Materials Letters
Volume	64
Issue number	1
DOIs	https://doi.org/10.1016/j.matlet.2009.10.027
Publication status	Published - 2010 Jan 15

Keywords

High deposition rate
Laser chemical vapor deposition
YBCO

ASJC Scopus subject areas

Materials Science(all)
Condensed Matter Physics
Mechanics of Materials
Mechanical Engineering

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title = "High-speed preparation of c-axis-oriented YBa2Cu3O7-δ film by laser chemical vapor deposition",

abstract = "YBa2Cu3O7-δ (YBCO) films were prepared by laser chemical vapor deposition using Y(DPM)3, Ba(DPM)2/Ba(TMOD)2 and Cu(DPM)2 as precursors with enhancement by a continuous wave Nd:YAG laser. A c-axis-oriented YBCO film almost entirely in a single phase was obtained. The YBCO film consisted of rectangular grains about 30 μm in size. The highest deposition rate was about 100 μm h- 1, which was 10-1000 times higher than that of conventional MOCVD.",

keywords = "High deposition rate, Laser chemical vapor deposition, YBCO",

author = "Pei Zhao and Akihiko Ito and Rong Tu and Takashi Goto",

note = "Funding Information: This work was supported in part by the International Superconductivity Technology Center (ISTEC) and by the Global COE program of Materials Integration, Tohoku University .",

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AU - Zhao, Pei

AU - Ito, Akihiko

AU - Tu, Rong

AU - Goto, Takashi

N1 - Funding Information: This work was supported in part by the International Superconductivity Technology Center (ISTEC) and by the Global COE program of Materials Integration, Tohoku University .

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N2 - YBa2Cu3O7-δ (YBCO) films were prepared by laser chemical vapor deposition using Y(DPM)3, Ba(DPM)2/Ba(TMOD)2 and Cu(DPM)2 as precursors with enhancement by a continuous wave Nd:YAG laser. A c-axis-oriented YBCO film almost entirely in a single phase was obtained. The YBCO film consisted of rectangular grains about 30 μm in size. The highest deposition rate was about 100 μm h- 1, which was 10-1000 times higher than that of conventional MOCVD.

AB - YBa2Cu3O7-δ (YBCO) films were prepared by laser chemical vapor deposition using Y(DPM)3, Ba(DPM)2/Ba(TMOD)2 and Cu(DPM)2 as precursors with enhancement by a continuous wave Nd:YAG laser. A c-axis-oriented YBCO film almost entirely in a single phase was obtained. The YBCO film consisted of rectangular grains about 30 μm in size. The highest deposition rate was about 100 μm h- 1, which was 10-1000 times higher than that of conventional MOCVD.

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