High-speed preparation of c-axis-oriented YBa2Cu3O7-δ film by laser chemical vapor deposition

Pei Zhao, Akihiko Ito, Rong Tu, Takashi Goto

Research output: Contribution to journalArticlepeer-review

19 Citations (Scopus)


YBa2Cu3O7-δ (YBCO) films were prepared by laser chemical vapor deposition using Y(DPM)3, Ba(DPM)2/Ba(TMOD)2 and Cu(DPM)2 as precursors with enhancement by a continuous wave Nd:YAG laser. A c-axis-oriented YBCO film almost entirely in a single phase was obtained. The YBCO film consisted of rectangular grains about 30 μm in size. The highest deposition rate was about 100 μm h- 1, which was 10-1000 times higher than that of conventional MOCVD.

Original languageEnglish
Pages (from-to)102-104
Number of pages3
JournalMaterials Letters
Issue number1
Publication statusPublished - 2010 Jan 15


  • High deposition rate
  • Laser chemical vapor deposition
  • YBCO

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

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