Abstract
YBa2Cu3O7-δ (YBCO) films were prepared by laser chemical vapor deposition using Y(DPM)3, Ba(DPM)2/Ba(TMOD)2 and Cu(DPM)2 as precursors with enhancement by a continuous wave Nd:YAG laser. A c-axis-oriented YBCO film almost entirely in a single phase was obtained. The YBCO film consisted of rectangular grains about 30 μm in size. The highest deposition rate was about 100 μm h- 1, which was 10-1000 times higher than that of conventional MOCVD.
Original language | English |
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Pages (from-to) | 102-104 |
Number of pages | 3 |
Journal | Materials Letters |
Volume | 64 |
Issue number | 1 |
DOIs | |
Publication status | Published - 2010 Jan 15 |
Keywords
- High deposition rate
- Laser chemical vapor deposition
- YBCO
ASJC Scopus subject areas
- Materials Science(all)
- Condensed Matter Physics
- Mechanics of Materials
- Mechanical Engineering