High-speed oxide coating by laser chemical vapor deposition and their nano-structure

Takashi Goto, Teiichi Kimura

Research output: Contribution to journalArticlepeer-review

34 Citations (Scopus)

Abstract

Oxide thick films, partially yttria-stabilized zirconia (YSZ) and titania (TiO2), were prepared by laser chemical vapor deposition (LCVD). The assistance of laser tremendously increased the deposition rate for YSZ and TiO2 films up to 660 and 2500 μm/h, respectively. The increase in the deposition rate was accompanied by plasma formation around the deposition zone, and the plasma was observed over critical values of laser power and substrate pre-heating temperature. A wide variety of morphologies of films from feather-like columnar to dense microstructures were obtained depending on deposition conditions. The columnar structure contained a large amount of nano-pores at columnar boundary and inside grains. These columnar structure and nano-pores were advantageous for applying YSZ films to thermal barrier coatings.

Original languageEnglish
Pages (from-to)46-52
Number of pages7
JournalThin Solid Films
Volume515
Issue number1
DOIs
Publication statusPublished - 2006 Sep 25

Keywords

  • Laser chemical vapor deposition
  • Morphology
  • Nano-structure
  • Titania
  • Yttria-stabilized zirconia

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Materials Chemistry

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