High-speed measurement of large area micro-structured surfaces

Jun Aoki, I Ko, Satoshi Kiyono

Research output: Contribution to conferencePaperpeer-review

Abstract

This paper presents a measurement system based on an AFM to measure large area micro-structured surfaces rapidly, which consists of a compact and precision AFM probe-unit, a linear stage and a spindle. The sample is mounted on the spindle and the AFM probe-unit is mounted on the linear stage. In this measurement system, the sample is measured rapidly in a spiral scanning pattern which is made by rotating the spindle and moving the linear stage in radial direction. Design of the measurement system, results of investigating the linear stage and the spindle performances are described. Profile measurement results of a micro-structured surface is also presented.

Original languageEnglish
Pages381-384
Number of pages4
Publication statusPublished - 2005 Dec 1
Event3rd International Conference on Leading Edge Manufacturing in 21st Century, LEM 2005 - Nagoya, Japan
Duration: 2005 Oct 192005 Oct 22

Other

Other3rd International Conference on Leading Edge Manufacturing in 21st Century, LEM 2005
CountryJapan
CityNagoya
Period05/10/1905/10/22

Keywords

  • Afm
  • High-speed measurement
  • Large area micro-structured surfaces
  • Linear encoder
  • Nanometrology

ASJC Scopus subject areas

  • Industrial and Manufacturing Engineering

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