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High-speed heteroepitaxial growth of 3C-SiC (111) thick films on Si (110) by laser chemical vapor deposition
Qingyun Sun, Peipei Zhu, Qingfang Xu, Rong Tu, Song Zhang, Ji Shi, Haiwen Li, Lianmeng Zhang, Takashi Goto, Jiasheng Yan, Shusen Li
Research output: Contribution to journal › Article › peer-review
17
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(Scopus)