High-speed growth of YBa2Cu3O7-δ film with high critical temperature on MgO single crystal substrate by laser chemical vapor deposition

Pei Zhao, Akihiko Ito, Rong Tu, Takashi Goto

Research output: Contribution to journalArticlepeer-review

15 Citations (Scopus)

Abstract

a-axis- and c-axis-oriented YBa2Cu3O 7-δ films were prepared on a (100) MgO single crystal substrate by chemical vapor deposition enhanced by a continuous wave Nd:YAG laser. A c-axis-oriented YBCO film with a critical temperature of 89 K was prepared at a high deposition rate of 57 μm h-1, about 2-600 times higher than that of conventional chemical vapor deposition.

Original languageEnglish
Article number125010
JournalSuperconductor Science and Technology
Volume23
Issue number12
DOIs
Publication statusPublished - 2010 Dec

ASJC Scopus subject areas

  • Ceramics and Composites
  • Condensed Matter Physics
  • Metals and Alloys
  • Electrical and Electronic Engineering
  • Materials Chemistry

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