High-speed growth of (103)-oriented Ba 2TiO 4 film by laser chemical vapor deposition

Dongyun Guo, Takashi Goto, Chuanbin Wang, Qiang Shen, Lianmeng Zhang

Research output: Contribution to journalArticlepeer-review

11 Citations (Scopus)

Abstract

Ba 2TiO 4 film was prepared on Pt/Ti/SiO 2/Si substrate by laser chemical vapor deposition. The orientation, microstructure and growth mode were investigated. The single-phase Ba 2TiO 4 film was obtained with (103) preferred orientation at high deposition rate (R dep = 45.6 μm h - 1). The (103)-oriented Ba 2TiO 4 film on Pt (111)/Ti/SiO 2/Si substrate showed the Ba 2TiO 4 [103]//Pt [1-10] growth mode due to the small crystal-lattice mismatch. The surface consisted of rectangular grains, and the cross-section was columnar microstructure.

Original languageEnglish
Pages (from-to)135-137
Number of pages3
JournalMaterials Letters
Volume70
DOIs
Publication statusPublished - 2012 Mar 1

Keywords

  • (103) orientation
  • Ba TiO film
  • Chemical vapor deposition
  • Crystal structure

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

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