High speed deposition of YSZ films by laser chemical vapor deposition

Teiichi Kimura, Takashi Goto

Research output: Contribution to journalConference articlepeer-review


Partially yttria-stabilized zirconia (YSZ) films were prepared by laser chemical vapor deposition (LCVD). The assistance of laser increased the deposition rate for YSZ films up to 660 μm/h. The increase in the deposition rate was accompanied by plasma formation around the deposition zone, and the plasma was observed over critical laser power and substrate pre-heating temperature. A wide variety of morphologies of films from feather-like columnar to dense textures were obtained depending on deposition conditions. The columnar texture contained a large amount of nano-pores at columnar boundary and inside grains. These columnar texture and nano-pores were advantageous for applying YSZ films to thermal barrier coatings.

Original languageEnglish
Pages (from-to)3-12
Number of pages10
JournalCeramic Transactions
Publication statusPublished - 2006 Jul 26
Event6th Pacific Rim Conference on Ceramic and Glass Technology, PacRim6 - Maui, HI, United States
Duration: 2005 Sep 112005 Sep 16

ASJC Scopus subject areas

  • Ceramics and Composites
  • Materials Chemistry


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