Abstract
Thick yttria (Y 2O 3) films were synthesized at high speeds by laser-assisted chemical vapor deposition (LCVD) using an Y(dpm) 3 (dpm = dipivaloylmethanate) precursor. The effects of deposition conditions on the deposition rate and their microstructure were investigated. While the deposition rate was less than a few microns per hour at low laser powers (P L) less than 100 W, significantly high deposition rates of more than 200 μm/h (56 nm/s) were obtained at P L more than 160 W. The highest deposition rate in this study was 300 μm/h (83 nm/s) being 100 to 1000 times greater than those of conventional CVD processes. Deposited films were dense and isotropic with no preferred orientation showing cauliflower-like microstructure.
Original language | English |
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Pages (from-to) | 2114-2116 |
Number of pages | 3 |
Journal | Materials Transactions |
Volume | 46 |
Issue number | 9 |
DOIs | |
Publication status | Published - 2005 Sep |
Keywords
- Cauliflower-like microstructure
- Deposition rate
- Laser chemical vapor deposition
- Y O film
- Y(dpm)
ASJC Scopus subject areas
- Materials Science(all)
- Condensed Matter Physics
- Mechanics of Materials
- Mechanical Engineering