High-speed deposition of oriented orthorhombic NaTaO3 films using laser chemical vapor deposition

Ali M. Huerta-Flores, Jianchao Chen, Akihiko Ito, Leticia M. Torres-Martínez, Edgar Moctezuma, Takashi Goto

Research output: Contribution to journalArticlepeer-review

4 Citations (Scopus)


We demonstrated the high-speed laser chemical vapor deposition of orthorhombic NaTaO3 (o-NaTaO3) films. The orientation of the o-NaTaO3 films was changed from (101) to (112) to (001) plane as the increase of deposition temperature from 823 to 913 K. o-NaTaO3 films had faceted surfaces and columnar cross sections. The deposition rates of o-NaTaO3 films were 48–120 µm h−1, which are 192–6000 times higher than those offered by wet-chemical routes.

Original languageEnglish
Pages (from-to)257-260
Number of pages4
JournalMaterials Letters
Publication statusPublished - 2016 Dec 1
Externally publishedYes


  • Laser chemical vapor deposition
  • Oriented growth
  • Orthorhombic NaTaO

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

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