High-speed deposition of highly-oriented calcium titanate film by laser CVD

Hirokazu Katsui, Yuki Kumagai, Takashi Goto

Research output: Contribution to journalArticlepeer-review

2 Citations (Scopus)

Abstract

Highly (011) and (101)-oriented calcium titanate (CaTiO3) films were synthesized by laser chemical vapor deposition (CVD) and the effect of deposition temperature on the morphology, orientation and deposition rate was investigated. (011)-oriented CaTiO3 films having cone-like morphology with pyramidal facets were grown below 800 K. As the deposition temperature increased to 800-1000 K, the orientation of CaTiO3 films changed from (011) to (101). The highly (101)-oriented CaTiO3 films showed the squarely faceted texture and the nano-pores formed along (011). The highest deposition rate was 230 μm h-1, which was 10 times as great as that by conventional thermal CVD.

Original languageEnglish
Pages (from-to)123-127
Number of pages5
JournalFuntai Oyobi Fummatsu Yakin/Journal of the Japan Society of Powder and Powder Metallurgy
Volume63
Issue number3
DOIs
Publication statusPublished - 2016 Mar

Keywords

  • Biomaterial
  • High-speed deposition
  • Laser chemical vapor deposition
  • Oriented texture

ASJC Scopus subject areas

  • Mechanical Engineering
  • Industrial and Manufacturing Engineering
  • Metals and Alloys
  • Materials Chemistry

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