High-speed deposition of highly-oriented calcium titanate film by laser CVD

Hirokazu Katsui; Yuki Kumagai; Takashi Goto

doi:10.2497/jjspm.63.123

High-speed deposition of highly-oriented calcium titanate film by laser CVD

Hirokazu Katsui, Yuki Kumagai, Takashi Goto

Research output: Contribution to journal › Article › peer-review

2 Citations (Scopus)

Abstract

Highly (011) and (101)-oriented calcium titanate (CaTiO₃) films were synthesized by laser chemical vapor deposition (CVD) and the effect of deposition temperature on the morphology, orientation and deposition rate was investigated. (011)-oriented CaTiO₃ films having cone-like morphology with pyramidal facets were grown below 800 K. As the deposition temperature increased to 800-1000 K, the orientation of CaTiO₃ films changed from (011) to (101). The highly (101)-oriented CaTiO₃ films showed the squarely faceted texture and the nano-pores formed along (011). The highest deposition rate was 230 μm h^-1, which was 10 times as great as that by conventional thermal CVD.

Original language	English
Pages (from-to)	123-127
Number of pages	5
Journal	Funtai Oyobi Fummatsu Yakin/Journal of the Japan Society of Powder and Powder Metallurgy
Volume	63
Issue number	3
DOIs	https://doi.org/10.2497/jjspm.63.123
Publication status	Published - 2016 Mar

Keywords

Biomaterial
High-speed deposition
Laser chemical vapor deposition
Oriented texture

ASJC Scopus subject areas

Mechanical Engineering
Industrial and Manufacturing Engineering
Metals and Alloys
Materials Chemistry

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abstract = "Highly (011) and (101)-oriented calcium titanate (CaTiO3) films were synthesized by laser chemical vapor deposition (CVD) and the effect of deposition temperature on the morphology, orientation and deposition rate was investigated. (011)-oriented CaTiO3 films having cone-like morphology with pyramidal facets were grown below 800 K. As the deposition temperature increased to 800-1000 K, the orientation of CaTiO3 films changed from (011) to (101). The highly (101)-oriented CaTiO3 films showed the squarely faceted texture and the nano-pores formed along (011). The highest deposition rate was 230 μm h-1, which was 10 times as great as that by conventional thermal CVD.",

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author = "Hirokazu Katsui and Yuki Kumagai and Takashi Goto",

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AU - Kumagai, Yuki

AU - Goto, Takashi

PY - 2016/3

Y1 - 2016/3

N2 - Highly (011) and (101)-oriented calcium titanate (CaTiO3) films were synthesized by laser chemical vapor deposition (CVD) and the effect of deposition temperature on the morphology, orientation and deposition rate was investigated. (011)-oriented CaTiO3 films having cone-like morphology with pyramidal facets were grown below 800 K. As the deposition temperature increased to 800-1000 K, the orientation of CaTiO3 films changed from (011) to (101). The highly (101)-oriented CaTiO3 films showed the squarely faceted texture and the nano-pores formed along (011). The highest deposition rate was 230 μm h-1, which was 10 times as great as that by conventional thermal CVD.

AB - Highly (011) and (101)-oriented calcium titanate (CaTiO3) films were synthesized by laser chemical vapor deposition (CVD) and the effect of deposition temperature on the morphology, orientation and deposition rate was investigated. (011)-oriented CaTiO3 films having cone-like morphology with pyramidal facets were grown below 800 K. As the deposition temperature increased to 800-1000 K, the orientation of CaTiO3 films changed from (011) to (101). The highly (101)-oriented CaTiO3 films showed the squarely faceted texture and the nano-pores formed along (011). The highest deposition rate was 230 μm h-1, which was 10 times as great as that by conventional thermal CVD.

KW - Biomaterial

KW - High-speed deposition

KW - Laser chemical vapor deposition

KW - Oriented texture

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High-speed deposition of highly-oriented calcium titanate film by laser CVD

Abstract

Keywords

ASJC Scopus subject areas

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