Abstract
Highly (011) and (101)-oriented calcium titanate (CaTiO3) films were synthesized by laser chemical vapor deposition (CVD) and the effect of deposition temperature on the morphology, orientation and deposition rate was investigated. (011)-oriented CaTiO3 films having cone-like morphology with pyramidal facets were grown below 800 K. As the deposition temperature increased to 800-1000 K, the orientation of CaTiO3 films changed from (011) to (101). The highly (101)-oriented CaTiO3 films showed the squarely faceted texture and the nano-pores formed along (011). The highest deposition rate was 230 μm h-1, which was 10 times as great as that by conventional thermal CVD.
Original language | English |
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Pages (from-to) | 123-127 |
Number of pages | 5 |
Journal | Funtai Oyobi Fummatsu Yakin/Journal of the Japan Society of Powder and Powder Metallurgy |
Volume | 63 |
Issue number | 3 |
DOIs | |
Publication status | Published - 2016 Mar |
Keywords
- Biomaterial
- High-speed deposition
- Laser chemical vapor deposition
- Oriented texture
ASJC Scopus subject areas
- Mechanical Engineering
- Industrial and Manufacturing Engineering
- Metals and Alloys
- Materials Chemistry