High-speed deposition of highly-oriented calcium titanate film by laser CVD

Hirokazu Katsui; Yuki Kumagai; Takashi Goto

doi:10.2497/jjspm.63.123

High-speed deposition of highly-oriented calcium titanate film by laser CVD

Hirokazu Katsui, Yuki Kumagai, Takashi Goto

Materials Processing and Characterization Division

Research output: Contribution to journal › Article › peer-review

3 Citations (Scopus)

Abstract

Highly (011) and (101)-oriented calcium titanate (CaTiO₃) films were synthesized by laser chemical vapor deposition (CVD) and the effect of deposition temperature on the morphology, orientation and deposition rate was investigated. (011)-oriented CaTiO₃ films having cone-like morphology with pyramidal facets were grown below 800 K. As the deposition temperature increased to 800-1000 K, the orientation of CaTiO₃ films changed from (011) to (101). The highly (101)-oriented CaTiO₃ films showed the squarely faceted texture and the nano-pores formed along (011). The highest deposition rate was 230 μm h^-1, which was 10 times as great as that by conventional thermal CVD.

Original language	English
Pages (from-to)	123-127
Number of pages	5
Journal	Funtai Oyobi Fummatsu Yakin/Journal of the Japan Society of Powder and Powder Metallurgy
Volume	63
Issue number	3
DOIs	https://doi.org/10.2497/jjspm.63.123
Publication status	Published - 2016 Mar

Keywords

Biomaterial
High-speed deposition
Laser chemical vapor deposition
Oriented texture

ASJC Scopus subject areas

Mechanical Engineering
Industrial and Manufacturing Engineering
Metals and Alloys
Materials Chemistry

Access to Document

10.2497/jjspm.63.123

Cite this

@article{709209d286c740bdaea780e2e6bff49d,

title = "High-speed deposition of highly-oriented calcium titanate film by laser CVD",

abstract = "Highly (011) and (101)-oriented calcium titanate (CaTiO3) films were synthesized by laser chemical vapor deposition (CVD) and the effect of deposition temperature on the morphology, orientation and deposition rate was investigated. (011)-oriented CaTiO3 films having cone-like morphology with pyramidal facets were grown below 800 K. As the deposition temperature increased to 800-1000 K, the orientation of CaTiO3 films changed from (011) to (101). The highly (101)-oriented CaTiO3 films showed the squarely faceted texture and the nano-pores formed along (011). The highest deposition rate was 230 μm h-1, which was 10 times as great as that by conventional thermal CVD.",

keywords = "Biomaterial, High-speed deposition, Laser chemical vapor deposition, Oriented texture",

author = "Hirokazu Katsui and Yuki Kumagai and Takashi Goto",

year = "2016",

month = mar,

doi = "10.2497/jjspm.63.123",

language = "English",

volume = "63",

pages = "123--127",

journal = "Funtai Oyobi Fummatsu Yakin/Journal of the Japan Society of Powder and Powder Metallurgy",

issn = "0532-8799",

publisher = "Funtai Funamtsu Yakin Kyokai/Japan Soc. of Powder Metallurgy",

number = "3",

}

TY - JOUR

T1 - High-speed deposition of highly-oriented calcium titanate film by laser CVD

AU - Katsui, Hirokazu

AU - Kumagai, Yuki

AU - Goto, Takashi

PY - 2016/3

Y1 - 2016/3

N2 - Highly (011) and (101)-oriented calcium titanate (CaTiO3) films were synthesized by laser chemical vapor deposition (CVD) and the effect of deposition temperature on the morphology, orientation and deposition rate was investigated. (011)-oriented CaTiO3 films having cone-like morphology with pyramidal facets were grown below 800 K. As the deposition temperature increased to 800-1000 K, the orientation of CaTiO3 films changed from (011) to (101). The highly (101)-oriented CaTiO3 films showed the squarely faceted texture and the nano-pores formed along (011). The highest deposition rate was 230 μm h-1, which was 10 times as great as that by conventional thermal CVD.

AB - Highly (011) and (101)-oriented calcium titanate (CaTiO3) films were synthesized by laser chemical vapor deposition (CVD) and the effect of deposition temperature on the morphology, orientation and deposition rate was investigated. (011)-oriented CaTiO3 films having cone-like morphology with pyramidal facets were grown below 800 K. As the deposition temperature increased to 800-1000 K, the orientation of CaTiO3 films changed from (011) to (101). The highly (101)-oriented CaTiO3 films showed the squarely faceted texture and the nano-pores formed along (011). The highest deposition rate was 230 μm h-1, which was 10 times as great as that by conventional thermal CVD.

KW - Biomaterial

KW - High-speed deposition

KW - Laser chemical vapor deposition

KW - Oriented texture

UR - http://www.scopus.com/inward/record.url?scp=84963804158&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84963804158&partnerID=8YFLogxK

U2 - 10.2497/jjspm.63.123

DO - 10.2497/jjspm.63.123

M3 - Article

AN - SCOPUS:84963804158

VL - 63

SP - 123

EP - 127

JO - Funtai Oyobi Fummatsu Yakin/Journal of the Japan Society of Powder and Powder Metallurgy

JF - Funtai Oyobi Fummatsu Yakin/Journal of the Japan Society of Powder and Powder Metallurgy

SN - 0532-8799

IS - 3

ER -

High-speed deposition of highly-oriented calcium titanate film by laser CVD

Abstract

Keywords

ASJC Scopus subject areas

Access to Document

Other files and links

Fingerprint

Cite this