High-speed deposition of highly (001)-oriented SrCO3 films prepared using laser chemical vapor deposition

Jianchao Chen; Akihiko Ito; Takashi Goto

doi:10.1016/j.ceramint.2015.05.149

High-speed deposition of highly (001)-oriented SrCO₃ films prepared using laser chemical vapor deposition

Jianchao Chen, Akihiko Ito, Takashi Goto

Materials Processing and Characterization Division

Research output: Contribution to journal › Article › peer-review

7 Citations (Scopus)

Abstract

Highly (001)-oriented SrCO₃ films were prepared using laser chemical vapor deposition. The degree of (001) orientation of the SrCO₃ films increased from 60% to 100% as the deposition temperature increased from 848 to 923 K. The surface morphology of the (001)-oriented SrCO₃ film was characterized by polygonal grains with striped facets, and pyramidal grains formed on the surface. The deposition rate increased as the deposition temperature increased, and the maximum deposition rate of the highly (001)-oriented SrCO₃ film was 205 μm h⁻¹.

Original language	English
Pages (from-to)	11810-11814
Number of pages	5
Journal	Ceramics International
Volume	41
Issue number	9
DOIs	https://doi.org/10.1016/j.ceramint.2015.05.149
Publication status	Published - 2015 Nov

Keywords

High deposition rate
Laser CVD
Orientation
SrCO

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Ceramics and Composites
Process Chemistry and Technology
Surfaces, Coatings and Films
Materials Chemistry

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10.1016/j.ceramint.2015.05.149

Cite this

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title = "High-speed deposition of highly (001)-oriented SrCO3 films prepared using laser chemical vapor deposition",

abstract = "Highly (001)-oriented SrCO3 films were prepared using laser chemical vapor deposition. The degree of (001) orientation of the SrCO3 films increased from 60% to 100% as the deposition temperature increased from 848 to 923 K. The surface morphology of the (001)-oriented SrCO3 film was characterized by polygonal grains with striped facets, and pyramidal grains formed on the surface. The deposition rate increased as the deposition temperature increased, and the maximum deposition rate of the highly (001)-oriented SrCO3 film was 205 μm h−1.",

keywords = "High deposition rate, Laser CVD, Orientation, SrCO",

author = "Jianchao Chen and Akihiko Ito and Takashi Goto",

note = "Funding Information: This research was supported in part by the Japan Society for the Promotion of Science , Grant-in-Aid for Young Scientists (A) (No. 25709069 ), and in part by the cooperative program (No. 15G0410 ) of the CRDAM-IMR, Tohoku University . Publisher Copyright: {\textcopyright} 2015 Elsevier Ltd and Techna Group S.r.l.",

year = "2015",

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language = "English",

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T1 - High-speed deposition of highly (001)-oriented SrCO3 films prepared using laser chemical vapor deposition

AU - Chen, Jianchao

AU - Ito, Akihiko

AU - Goto, Takashi

N1 - Funding Information: This research was supported in part by the Japan Society for the Promotion of Science , Grant-in-Aid for Young Scientists (A) (No. 25709069 ), and in part by the cooperative program (No. 15G0410 ) of the CRDAM-IMR, Tohoku University . Publisher Copyright: © 2015 Elsevier Ltd and Techna Group S.r.l.

PY - 2015/11

Y1 - 2015/11

N2 - Highly (001)-oriented SrCO3 films were prepared using laser chemical vapor deposition. The degree of (001) orientation of the SrCO3 films increased from 60% to 100% as the deposition temperature increased from 848 to 923 K. The surface morphology of the (001)-oriented SrCO3 film was characterized by polygonal grains with striped facets, and pyramidal grains formed on the surface. The deposition rate increased as the deposition temperature increased, and the maximum deposition rate of the highly (001)-oriented SrCO3 film was 205 μm h−1.

AB - Highly (001)-oriented SrCO3 films were prepared using laser chemical vapor deposition. The degree of (001) orientation of the SrCO3 films increased from 60% to 100% as the deposition temperature increased from 848 to 923 K. The surface morphology of the (001)-oriented SrCO3 film was characterized by polygonal grains with striped facets, and pyramidal grains formed on the surface. The deposition rate increased as the deposition temperature increased, and the maximum deposition rate of the highly (001)-oriented SrCO3 film was 205 μm h−1.

KW - High deposition rate

KW - Laser CVD

KW - Orientation

KW - SrCO

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