High-speed deposition of dense, dendritic and porous SiO2 films by Nd: YAG laser chemical vapor deposition

Jun Endo, Akihiko Ito, Teiichi Kimura, Takashi Goto

Research output: Contribution to journal › Article › peer-review

12 Citations (Scopus)

Fingerprint

Dive into the research topics of 'High-speed deposition of dense, dendritic and porous SiO2 films by Nd: YAG laser chemical vapor deposition'. Together they form a unique fingerprint.

Physics & Astronomy

Engineering & Materials Science

Chemical Compounds