This paper reports on a novel non-contact thermal imaging method with high spatial, temporal and temperature resolution for microdevice evaluation. This method uses a temperature sensitive paint with europium (III) thenoyltrifluoroacetone (Eu(TTA)3). The luminescence of Eu(TTA) 3 was excited by a short pulsed UV light; a temporal resolution as high as 0.2 ms was achieved under normal CCD camera observation. Also, a spatial resolution of about 39 μm and a temperature fluctuation of about ±0.2 °C were demonstrated.
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Mechanics of Materials
- Mechanical Engineering
- Electrical and Electronic Engineering