High spatial, temporal and temperature resolution thermal imaging method using Eu(TTA)3 temperature sensitive paint

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6 Citations (Scopus)

Abstract

This paper reports on a novel non-contact thermal imaging method with high spatial, temporal and temperature resolution for microdevice evaluation. This method uses a temperature sensitive paint with europium (III) thenoyltrifluoroacetone (Eu(TTA)3). The luminescence of Eu(TTA) 3 was excited by a short pulsed UV light; a temporal resolution as high as 0.2 ms was achieved under normal CCD camera observation. Also, a spatial resolution of about 39 μm and a temperature fluctuation of about ±0.2 °C were demonstrated.

Original languageEnglish
Article number114015
JournalJournal of Micromechanics and Microengineering
Volume23
Issue number11
DOIs
Publication statusPublished - 2013 Nov

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Mechanics of Materials
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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