High spatial, temporal and temperature resolution thermal imaging method using Eu(TTA)3 temperature sensitive paint

Takashiro Tsukamoto; Masayoshi Esashi; Shuji Tanaka

doi:10.1088/0960-1317/23/11/114015

High spatial, temporal and temperature resolution thermal imaging method using Eu(TTA)₃ temperature sensitive paint

Takashiro Tsukamoto, Masayoshi Esashi, Shuji Tanaka

Research output: Contribution to journal › Article › peer-review

6 Citations (Scopus)

Abstract

This paper reports on a novel non-contact thermal imaging method with high spatial, temporal and temperature resolution for microdevice evaluation. This method uses a temperature sensitive paint with europium (III) thenoyltrifluoroacetone (Eu(TTA)₃). The luminescence of Eu(TTA) ₃ was excited by a short pulsed UV light; a temporal resolution as high as 0.2 ms was achieved under normal CCD camera observation. Also, a spatial resolution of about 39 μm and a temperature fluctuation of about ±0.2 °C were demonstrated.

Original language	English
Article number	114015
Journal	Journal of Micromechanics and Microengineering
Volume	23
Issue number	11
DOIs	https://doi.org/10.1088/0960-1317/23/11/114015
Publication status	Published - 2013 Nov

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Mechanics of Materials
Mechanical Engineering
Electrical and Electronic Engineering

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10.1088/0960-1317/23/11/114015

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AB - This paper reports on a novel non-contact thermal imaging method with high spatial, temporal and temperature resolution for microdevice evaluation. This method uses a temperature sensitive paint with europium (III) thenoyltrifluoroacetone (Eu(TTA)3). The luminescence of Eu(TTA) 3 was excited by a short pulsed UV light; a temporal resolution as high as 0.2 ms was achieved under normal CCD camera observation. Also, a spatial resolution of about 39 μm and a temperature fluctuation of about ±0.2 °C were demonstrated.

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High spatial, temporal and temperature resolution thermal imaging method using Eu(TTA)₃ temperature sensitive paint

Abstract

ASJC Scopus subject areas

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