High-sensitive organic contaminants detecting method based on Cold-Trap and Multiple-Internal-Reflection FTIR

K. Maruo, Y. Maeda, M. Niwano

Research output: Contribution to journalConference articlepeer-review

Abstract

This paper presents a high-sensitive organic contaminants detecting method in clean room air. Using a Fourier Transform Infra-Red spectroscopy (FTIR), we can detect various chemical compounds including organic contaminants in a few minutes. In addition, by combining two efficient methods: Multiple Internal Reflection (MIR) and Cold Trap (CT), the sensitivity rate of detection chemical compounds rises drastically. By conducting experiments, it has been demonstrated that this sensitivity rate reaches to the order of ppb. This method will be used as an integral part of clean room air monitoring systems.

Original languageEnglish
Pages (from-to)469-472
Number of pages4
JournalIEEE International Symposium on Semiconductor Manufacturing Conference, Proceedings
Publication statusPublished - 2001 Nov 28
EventIEEE International Symposium on Semiconductor Manufacturing (ISSIM) 2001 - San Jose, CA, United States
Duration: 2001 Oct 82001 Oct 10

Keywords

  • Cold trap
  • FTIR
  • Multiple internal reflection
  • Organic contamination

ASJC Scopus subject areas

  • Engineering(all)

Fingerprint Dive into the research topics of 'High-sensitive organic contaminants detecting method based on Cold-Trap and Multiple-Internal-Reflection FTIR'. Together they form a unique fingerprint.

Cite this