High Sensitive Microforce Measurement by a Range Variable Sensor

M. A. Salam Akanda, H. Tohmyoh, M. Saka

Research output: Contribution to journalConference articlepeer-review

4 Citations (Scopus)


Sensitive force sensing in micromanipulation using a small integrated sensor is reported, where the tactile force at probe is converted as cantilever deflection, which is measured by a small capacitive sensor. The force measurement range can be set to any desired value by changing the stiffness of the cantilever using a length changing option. The utility of the sensor is described in testing a micro object by using three different force measurement ranges, roughly 0-260, 0-1100, and 0-16200μN. For all the ranges the sensor achieves linearity and high sensitivity as 38.3, 9.06 and 0.61 kV/N with the force resolutions of 0.5, 2.0 and 30 μN, respectively.

Original languageEnglish
Pages (from-to)871-874
Number of pages4
JournalProcedia Chemistry
Issue number1
Publication statusPublished - 2009 Sep
EventEurosensors 23rd Conference - Lausanne, Switzerland
Duration: 2009 Sep 62009 Sep 9


  • Cantilever
  • Capacitive sensor
  • High sensitive
  • Integrated sensor
  • Microforce
  • Range variable

ASJC Scopus subject areas

  • Chemistry(all)
  • Chemical Engineering(all)


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