Abstract
Sensitive force sensing in micromanipulation using a small integrated sensor is reported, where the tactile force at probe is converted as cantilever deflection, which is measured by a small capacitive sensor. The force measurement range can be set to any desired value by changing the stiffness of the cantilever using a length changing option. The utility of the sensor is described in testing a micro object by using three different force measurement ranges, roughly 0-260, 0-1100, and 0-16200μN. For all the ranges the sensor achieves linearity and high sensitivity as 38.3, 9.06 and 0.61 kV/N with the force resolutions of 0.5, 2.0 and 30 μN, respectively.
Original language | English |
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Pages (from-to) | 871-874 |
Number of pages | 4 |
Journal | Procedia Chemistry |
Volume | 1 |
Issue number | 1 |
DOIs | |
Publication status | Published - 2009 Sep |
Event | Eurosensors 23rd Conference - Lausanne, Switzerland Duration: 2009 Sep 6 → 2009 Sep 9 |
Keywords
- Cantilever
- Capacitive sensor
- High sensitive
- Integrated sensor
- Microforce
- Range variable
ASJC Scopus subject areas
- Chemistry(all)
- Chemical Engineering(all)