High Sensitive Microforce Measurement by a Range Variable Sensor

M. A. Salam Akanda; H. Tohmyoh; M. Saka

doi:10.1016/j.proche.2009.07.217

High Sensitive Microforce Measurement by a Range Variable Sensor

M. A. Salam Akanda, H. Tohmyoh, M. Saka

ENG - Finemechanics

Research output: Contribution to journal › Conference article › peer-review

2 Citations (Scopus)

Abstract

Sensitive force sensing in micromanipulation using a small integrated sensor is reported, where the tactile force at probe is converted as cantilever deflection, which is measured by a small capacitive sensor. The force measurement range can be set to any desired value by changing the stiffness of the cantilever using a length changing option. The utility of the sensor is described in testing a micro object by using three different force measurement ranges, roughly 0-260, 0-1100, and 0-16200μN. For all the ranges the sensor achieves linearity and high sensitivity as 38.3, 9.06 and 0.61 kV/N with the force resolutions of 0.5, 2.0 and 30 μN, respectively.

Original language	English
Pages (from-to)	871-874
Number of pages	4
Journal	Procedia Chemistry
Volume	1
Issue number	1
DOIs	https://doi.org/10.1016/j.proche.2009.07.217
Publication status	Published - 2009 Sep
Event	Eurosensors 23rd Conference - Lausanne, Switzerland Duration: 2009 Sep 6 → 2009 Sep 9

Keywords

Cantilever
Capacitive sensor
High sensitive
Integrated sensor
Microforce
Range variable

ASJC Scopus subject areas

Chemistry(all)
Chemical Engineering(all)

Access to Document

10.1016/j.proche.2009.07.217

Cite this

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title = "High Sensitive Microforce Measurement by a Range Variable Sensor",

abstract = "Sensitive force sensing in micromanipulation using a small integrated sensor is reported, where the tactile force at probe is converted as cantilever deflection, which is measured by a small capacitive sensor. The force measurement range can be set to any desired value by changing the stiffness of the cantilever using a length changing option. The utility of the sensor is described in testing a micro object by using three different force measurement ranges, roughly 0-260, 0-1100, and 0-16200μN. For all the ranges the sensor achieves linearity and high sensitivity as 38.3, 9.06 and 0.61 kV/N with the force resolutions of 0.5, 2.0 and 30 μN, respectively.",

keywords = "Cantilever, Capacitive sensor, High sensitive, Integrated sensor, Microforce, Range variable",

author = "{Salam Akanda}, {M. A.} and H. Tohmyoh and M. Saka",

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AU - Salam Akanda, M. A.

AU - Tohmyoh, H.

AU - Saka, M.

PY - 2009/9

Y1 - 2009/9

N2 - Sensitive force sensing in micromanipulation using a small integrated sensor is reported, where the tactile force at probe is converted as cantilever deflection, which is measured by a small capacitive sensor. The force measurement range can be set to any desired value by changing the stiffness of the cantilever using a length changing option. The utility of the sensor is described in testing a micro object by using three different force measurement ranges, roughly 0-260, 0-1100, and 0-16200μN. For all the ranges the sensor achieves linearity and high sensitivity as 38.3, 9.06 and 0.61 kV/N with the force resolutions of 0.5, 2.0 and 30 μN, respectively.

AB - Sensitive force sensing in micromanipulation using a small integrated sensor is reported, where the tactile force at probe is converted as cantilever deflection, which is measured by a small capacitive sensor. The force measurement range can be set to any desired value by changing the stiffness of the cantilever using a length changing option. The utility of the sensor is described in testing a micro object by using three different force measurement ranges, roughly 0-260, 0-1100, and 0-16200μN. For all the ranges the sensor achieves linearity and high sensitivity as 38.3, 9.06 and 0.61 kV/N with the force resolutions of 0.5, 2.0 and 30 μN, respectively.

KW - Cantilever

KW - Capacitive sensor

KW - High sensitive

KW - Integrated sensor

KW - Microforce

KW - Range variable

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ER -

High Sensitive Microforce Measurement by a Range Variable Sensor

Abstract

Keywords

ASJC Scopus subject areas

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