X-ray microbeam generated by a Kirkpatrik-Baez (KB) mirror optics with a set of two parabolic-shaped reflective surfaces was tested at an undulator beamline BL47XU of SPring-8. The KB mirror used in the experiment was fabricated by numerically-controlled polishing technique at Cannon Co. Ltd. Measured focal spot size at the x-ray energy of 8 keV in the vertical and the horizontal were 0.75 μm and 0.32 μm, respectively. The photon flux of the focal spot was 2 × 1010 [photons/ s/100 mA ring current]. Tantalum test pattern of the 0.2 μm line width was clearly observed with raster scan.
|Number of pages||4|
|Journal||Journal De Physique. IV : JP|
|Publication status||Published - 2003 Mar|
|Event||7th International Conference on X-Ray Microscopy - Grenoble, France|
Duration: 2002 Jul 28 → 2002 Aug 2
ASJC Scopus subject areas
- Physics and Astronomy(all)