High-resolution X-ray microbeam by using a Kirkpatrik-BaezType mirror at SPring-8

A. Takeuchi, Y. Suzuki, H. Takano

Research output: Contribution to journalConference articlepeer-review

7 Citations (Scopus)

Abstract

X-ray microbeam generated by a Kirkpatrik-Baez (KB) mirror optics with a set of two parabolic-shaped reflective surfaces was tested at an undulator beamline BL47XU of SPring-8. The KB mirror used in the experiment was fabricated by numerically-controlled polishing technique at Cannon Co. Ltd. Measured focal spot size at the x-ray energy of 8 keV in the vertical and the horizontal were 0.75 μm and 0.32 μm, respectively. The photon flux of the focal spot was 2 × 1010 [photons/ s/100 mA ring current]. Tantalum test pattern of the 0.2 μm line width was clearly observed with raster scan.

Original languageEnglish
Pages (from-to)235-238
Number of pages4
JournalJournal De Physique. IV : JP
Volume104
DOIs
Publication statusPublished - 2003 Mar
Externally publishedYes
Event7th International Conference on X-Ray Microscopy - Grenoble, France
Duration: 2002 Jul 282002 Aug 2

ASJC Scopus subject areas

  • Physics and Astronomy(all)

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