High resolution TEM observation of Si nanoparticle interfaces fabricated by SIMOX

Manabu Okui, Tomohiro Saitou, Yukari Ishikawa, Noriyoshi Shibata, Yuichi Ikuhara

Research output: Contribution to journalArticlepeer-review

1 Citation (Scopus)


Highly-oriented Si nanoparticles (SNP) were precipitated in amorphous SiO2 using separation by implanted oxygen(SIMOX) method and showed visible luminescence at room temperature. In order to investigate the microstructure of the SNPs, we observed the Si/SiO2 interface by cross-sectional high-resolution transmission electron microscopy (HRTEM). The three-dimensional shape of the SNPs observed from different directions is an {111}-surrounded octahedral structure, each apex of which has an {100} facet. The upper (surface-side) interface of SiO2/Si (100) contains missing atomic rows, while the lower (substrate-side) interface of Si (100)/SiO2 is atomically flat except for the steps at the intersection with (111) plane. Similar atomically sharp structures were observed at the Si {111}/SiO2 interfaces. Image-simulation of the interfaces well reproduced the microstructures observed by HRTEM and proved that the interfaces are those of amorphous SiO3 and single-crystal Si without, any intermediate laver.

Original languageEnglish
Pages (from-to)1255-1258
Number of pages4
JournalJournal of the Ceramic Society of Japan
Issue number12
Publication statusPublished - 1998 Dec
Externally publishedYes


  • Interface
  • Silicon
  • Silicon dioxide
  • Simulation
  • TEM

ASJC Scopus subject areas

  • Ceramics and Composites
  • Chemistry(all)
  • Condensed Matter Physics
  • Materials Chemistry


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