High-resolution scanning electron microscopy observation of electrochemical etching in the formation of gate grooves for InP-based modulation-doped field-effect transistors

Dong Xu, Takatomo Enoki, Tetsuya Suemitsu, Yasunobu Ishii

Research output: Contribution to journalArticlepeer-review

Fingerprint

Dive into the research topics of 'High-resolution scanning electron microscopy observation of electrochemical etching in the formation of gate grooves for InP-based modulation-doped field-effect transistors'. Together they form a unique fingerprint.

Engineering & Materials Science

Physics & Astronomy