High-resolution periodically poled structure in diazo-dye-substituted polymer film based on direct electron-beam writing technique

A periodically poled pattern in diazo-dye-substituted nonlinear optical polymer film is fabricated by direct electron-beam (EB) writing. It is found that the second-order nonlinearity of corona-poled polymer thin film is erased after EB irradiation. Moreover, the exposed region can be easily removed by conventional wet development. A high-resolution periodically poled structure (i.e., χ⁽²⁾ grating) with a period of 0.60 μm is demonstrated based on the direct EB writing technique.